Kev txheej txheej uas tiv taus kev ua kom tsis muaj zog yog ib txoj kev txheej txheej uas siv lub tshuab nqus tsev los ua kom tsis muaj zog. "Kev ua kom tsis muaj zog" yog hais txog ib txoj kev npaj zaj duab xis nyias uas cov khoom txheej hauv lub tshuab nqus tsev raug cua sov thiab ua kom tsis muaj zog, yog li cov khoom siv atoms lossis molecules ua kom tsis muaj zog thiab khiav tawm ntawm qhov chaw, tsim cov pa dej ntws, tshwm sim rau ntawm qhov chaw ntawm lub substrate lossis substrate, thiab thaum kawg ua kom sib xyaw ua ib zaj duab xis khov kho.
Txoj kev tiv thaiv evaporation qhov chaw txheej txheem yog siv tantalum, molybdenum, tungsten thiab lwm yam hlau melting point siab los ua ib daim duab tsim nyog ntawm qhov chaw evaporation, uas muaj cov khoom siv kom evaporate, cia cua ntws los ntawm, ncaj qha cua sov thiab evaporate cov khoom evaporated, lossis muab cov khoom siv kom evaporate rau hauv alumina, beryllium oxide thiab lwm yam crucibles rau kev cua sov tsis ncaj qha thiab evaporation. Qhov no yog txoj kev tiv thaiv cua sov evaporation.
Lublub tshuab nqus tsev evaporation txheej tshuabLub tshuab cua sov uas siv hluav taws xob ua kom sov thiab ua kom qhuav muaj qhov zoo ntawm cov qauv yooj yim, pheej yig thiab siv tau zoo. Nws siv tau rau kev ua kom cov khoom siv yaj qis, tshwj xeeb tshaj yog rau kev tsim khoom loj nrog qhov yuav tsum tau ua kom zoo. Txog tam sim no, tseem muaj ntau cov txheej txheem ua kom sov thiab ua kom qhuav siv rau hauv kev tsim cov iav aluminized.
Qhov tsis zoo ntawm txoj kev siv txoj kev evaporation evaporation coating yog tias qhov kub siab tshaj plaws uas tuaj yeem ncav cuag los ntawm kev cua sov yog txwv, thiab lub neej ua haujlwm ntawm lub tshuab cua sov kuj luv luv. Nyob rau hauv xyoo tas los no, txhawm rau txhim kho lub neej ntawm qhov chaw evaporation tiv thaiv, lub Hoobkas khoom siv tau siv cov khoom siv ceramic conductive synthesized los ntawm boron nitride nrog lub neej ntev ua qhov chaw evaporation. Raws li daim ntawv tshaj tawm patent Nyiv, nws tuaj yeem siv cov ntaub ntawv tsim los ntawm 20% ~ 30% boron nitride thiab cov ntaub ntawv refractory uas tuaj yeem fused nrog nws los ua qhov chaw evaporation (crucible), thiab txheej nws qhov chaw nrog ib txheej ntawm zirconium uas muaj 62% ~ 82%, thiab qhov seem yog zirconium-silicon alloy cov ntaub ntawv.
Lub sijhawm tshaj tawm: Plaub Hlis-22-2023