Yintoni i-resistance evaporation source coating?

Ukwambathisa umthombo wokufuma we-resistance yindlela esisiseko yokumbathisa i-vacuum evaporation. Igama elithi “Evaporation” libhekisa kwindlela yokulungiselela ifilimu encinci apho izinto zokugquma kwigumbi lokufuma zifudunyezwa kwaye ziphele, ukuze iiathom okanye iimolekyuli zezinto ziphele kwaye ziphume kumphezulu, zenze into yokuhamba komphunga, isiganeko kumphezulu we-substrate okanye i-substrate, kwaye ekugqibeleni zinciphe ukuze zenze ifilimu eqinileyo.

Indlela ebizwa ngokuba yi-resistance evaporation source coating kukusebenzisa i-tantalum, i-molybdenum, i-tungsten kunye nezinye iintsimbi ezine-high melting point metals ukwenza imo efanelekileyo yomthombo womphunga, ogcwele izinto eziza kuphuma, uvumele umoya udlule, ufudumale kwaye uphume ngqo kwizinto eziphumayo, okanye ubeke izinto eziza kuphuma zibe yi-alumina, i-beryllium oxide kunye nezinye izinto ezivuthayo ukuze kufudumale ngokungathanga ngqo kwaye kuphume umphunga. Le yindlela yokumelana nokuphuma komphunga.

Iumatshini wokugquma nge-vacuum evaporationIshushu kwaye ikhutshwe yi-resistance heater ineengenelo zesakhiwo esilula, ixabiso eliphantsi kunye nokusetyenziswa okuthembekileyo. Ingasetyenziselwa ukugquma izinto ezinamanqanaba okunyibilika aphantsi, ingakumbi kwimveliso enkulu eneemfuno eziphantsi zomgangatho wokugquma. Okwangoku, kusekho inani elikhulu leenkqubo zokugquma zokugquma kunye nokufudumeza ezisetyenziswa ekuveliseni izibuko ezine-aluminium.

Iingxaki zendlela yokugquma umphunga womthombo wokuxhathisa kukuba ubushushu obuphezulu obunokufikelelwa ngokufudumeza bulinganiselwe, kwaye ubomi benkonzo yesifudumezi nabo bufutshane. Kwiminyaka yakutshanje, ukuze kuphuculwe ubomi bomthombo wokuxhathisa umphunga, umzi-mveliso wezixhobo uye wamkela izinto zeseramikhi eziqhubayo ezenziwe yi-boron nitride ezinobomi obude njengomthombo wokuxhathisa umphunga. Ngokwengxelo yelungelo lomenzi laseJapan, ingasebenzisa izixhobo ezenziwe nge-20% ~ 30% boron nitride kunye nezinto ezichaseneyo ezinokudityaniswa nayo ukwenza umthombo wokuxhathisa umphunga (onokuqhekeka), kwaye zigqume umphezulu wayo ngomaleko we-zirconium equlethe i-62% ~ 82%, kwaye ezinye zizinto ze-zirconium-silicon alloy.