Ezinhlelweni zokumboza nge-vacuum, amaphampu e-vacuum adlala indima ebalulekile. Ayingxenye ebalulekile yokufeza indawo ene-vacuum ephezulu edingekayo ezinqubweni zokumboza, okuthinta ngqo ukusebenza kahle kokumboza, ikhwalithi yefilimu, kanye nokukhiqiza. Izinqubo ezahlukene zokumboza zinezidingo zezinga le-vacuum ezihlukene, okwenza ukukhetha okufanele kwephampu kubaluleke kakhulu. Njengomkhiqizi wemishini yokumboza nge-vacuum ohamba phambili, i-Zhenhua Vacuum inikeza ukuhlaziywa okuphelele kwezinhlobo ezinkulu zamaphampu e-vacuum kanye nezicelo zazo ezithile kubuchwepheshe bokumboza.
Ukuhlukaniswa Kwezimpompi Zokuhlanza Okungunombolo 1
Ngokusekelwe ezimisweni zokusebenza, amaphampu e-vacuum angahlukaniswa kanje:
1. Amaphampu Omshini (Amaphampu Angaphambili)
Ngokuyinhloko isetshenziselwa ukususa izinhlelo kusuka ekucindezelekeni komoya ziye ku-vacuum ephansi (10⁻¹ ~ 10⁻³ Pa), ngokuvamile isebenza njengamaphampu asekelayo amaphampu ane-vacuum ephezulu.
Amaphampu e-Rotary Vane: Umklamo omncane, ukulungiswa okulula, ofanele izinhlelo zokumboza ezincane.
Amaphampu Ezikulufo Ezomile: Ukusebenza okungenawo uwoyela, kulungele izinhlelo ze-vacuum ezihlanzekile ezinezidingo eziphezulu zokuhlanzeka.
2. Amaphampu e-Turbomolecular (Amaphampu Ane-Vacuum Ephakeme)
Iyakwazi ukufeza i-vacuum ephezulu kakhulu (≤10⁻⁶ Pa), evame ukuhlanganiswa namaphampu omshini wezinqubo ze-PVD (Physical Vapor Deposition) kanye ne-CVD (Chemical Vapor Deposition). Zihlinzeka ngezimo ze-vacuum ezihlanzekile nezizinzile, okwenza zibe yingxenye ebalulekile ezinhlelweni zokumboza ezinembe kakhulu.
3. Amaphampu Okusabalalisa
Nakuba zikwazi ukufinyelela ku-10⁻⁶ Pa, ukungcola komusi wazo kawoyela kunciphisa ukusetshenziswa kwazo ezimbozweni ezibonakalayo nakwezinye izinhlelo zokusebenza ezihlanzekile kakhulu. Zithathelwa indawo kakhulu ngamaphampu e-turbomolecular ezinhlelweni zokumboza zezimboni.
4. Amaphampu Ezimpande (Amaphampu Okuphakamisa)
Ivame ukusetshenziswa ngamaphampu e-rotary vane ngesikhathi sesigaba se-vacuum esimaphakathi ukuze kuthuthukiswe isivinini sokupompa nokunciphisa isikhathi sokwehlisa iphampu ngaphambi kokumboza.
5. Amaphampu e-Turbo Molecular
Zaziwa ngesivinini esikhulu sokupompa kanye nokusebenza okuzinzile, zisetshenziswa kabanzi ezinhlelweni zokugqoka ze-semiconductor, i-optical, kanye nezokwelapha ezidinga ukukhiqizwa okuqhubekayo.
Izimo Zokusebenza Eziyi-2 Ekumbozeni I-Vacuum
Kusetshenziswa ukucushwa okuhlukene kwephampu ye-vacuum ezigabeni ezahlukene zokumboza:
Isigaba Sokuqala Sokupompa: Amaphampu emishini (isb., i-rotary vane, amaphampu omile) anciphisa ngokushesha ingcindezi yegumbi.
Isigaba Esimaphakathi Sokushayisa: Amaphampu ezimpande athuthukisa ukusebenza kahle kokuphuma.
Isigaba Esine-Vacuum Ephakeme: Amaphampu e-Turbomolecular/Turbo asungula indawo edingekayo ene-vacuum ephezulu.
Izinqubo Ezikhethekile Zokumboza: Ukumpompa kwe-Magnetron kanye nokuhwamuka kwe-E-beam kudinga izinhlelo ezingenawoyela noma amaphampu omile asebenza kahle ukuqinisekisa ubumsulwa befilimu.
Ukukhethwa kwephampu kumele kucabangele uhlobo lwezinto, izinga lokushisa lenqubo, ukujiya kwefilimu, kanye nomthamo wesistimu ukuze kuhlangatshezwane nezimfuneko ezithile zezinga le-vacuum kanye nokuhlanzeka.
Cha. 3 Ukukhetha Uhlelo Lwephampu Lokupompa Olufanele
Uhlelo lokupompa olufanele lwe-vacuum kufanele lube nalokhu okulandelayo:
Isivinini sokupompa sifana nomthamo wegumbi
Ukufezwa kwesikhala sokugcina esiqondiwe
Ukusebenza okuzinzile nokulungiswa okuphansi
Ukusebenza okungenawoyela nokungenazinhlayiyana
Ukuhambisana nezindinganiso zemvelo nezamandla
Ukuze kusetshenziswe ukumbozwa okuqondile, kwe-semiconductor, noma kokuhlobisa, kunconywa inhlanganisela yezigaba ezintathu (i-Dry Pump + Roots Pump + Turbomolecular Pump).
Nakuba zincane, amaphampu e-vacuum abalulekile ezinhlelweni zokumboza nge-vacuum. Ukukhetha nokuhlela kahle amaphampu kuthuthukisa ikhwalithi yefilimu, ukusebenza kahle kwesistimu, isikhathi sokuphila kwemishini, kanye nokusebenza kahle kwezindleko. Xhumana ne-Zhenhua Vacuum ukuthola izixazululo ze-vacuum ezenzelwe wena ezifanela izidingo zakho zokumboza.
-Lesi sihloko sikhishwe yi- umenzi womshini wokumboza nge-vacuum I-Zhenhua Vacuum.
Isikhathi sokuthunyelwe: Juni-14-2025