Litsamaisong tsa ho koahela ka vacuum, lipompo tsa vacuum li bapala karolo ea bohlokoa. Ke likarolo tsa bohlokoa bakeng sa ho fihlela tikoloho e nang le vacuum e ngata e hlokahalang bakeng sa lits'ebetso tsa ho koahela, e amang ka kotloloho katleho ea ho koahela, boleng ba filimi le chai ea tlhahiso. Mekhoa e fapaneng ea ho koahela e na le litlhoko tse fapaneng tsa boemo ba vacuum, e leng se etsang hore khetho e nepahetseng ea pompo e be ea bohlokoa. Joaloka moetsi ea ka sehloohong oa lisebelisoa tsa ho koahela ka vacuum, Zhenhua Vacuum e fana ka tlhahlobo e felletseng ea mefuta e meholo ea lipompo tsa vacuum le lits'ebetso tsa tsona tse ikhethileng mahlaleng a ho koahela.
Tlhophiso ea 1 ea Lipompo tsa Vacuum
Ho latela melao-motheo ea ts'ebetso, lipompo tsa vacuum li ka aroloa ka lihlopha tse latelang:
1. Lipompo tsa Mekaniki (Lipompo tsa Pele)
Haholo-holo e sebediswa ho tlosa ditsamaiso kgatellong ya sepakapaka ho ya ho vacuum e tlase (10⁻¹ ~ 10⁻³ Pa), hangata e sebetsa e le dipompo tse tshehetsang dipompo tse nang le vacuum e ngata.
Lipompo tsa Rotary Vane: Moralo o monyane, tlhokomelo e bonolo, e loketse litsamaiso tse nyane tsa ho roala.
Lipompo tsa Sekurufu se Omileng: Ts'ebetso e se nang oli, e loketse litsamaiso tse hloekileng tsa vacuum tse nang le litlhoko tse phahameng tsa bohloeki.
2. Lipompo tsa Turbomolecular (Lipompo tse nang le Vacuum e ngata)
E khona ho fihlela vacuum e phahameng haholo (≤10⁻⁶ Pa), hangata e kopantsoe le lipompo tsa mechini bakeng sa lits'ebetso tsa PVD (Physical Vapor Deposition) le CVD (Chemical Vapor Deposition). Li fana ka maemo a hloekileng, a tsitsitseng a vacuum e phahameng, e leng se etsang hore e be karolo ea bohlokoa lits'ebetsong tsa ho roala tse nepahetseng haholo.
3. Lipompo tsa Phallo
Leha di kgona ho fihla ho 10⁻⁶ Pa, tshilafatso ya mouwane wa tsona wa oli e fokotsa tshebediso ya tsona ho dikoahelong tsa optical le ditshebedisong tse ding tsa bohloeki bo hodimo. Di nkeloa sebaka ke dipompo tsa turbomolecular ditsamaisong tsa ho koaheloa ke diindasteri.
4. Lipompo tsa Metso (Lipompo tsa Matlafatso)
E sebelisoa hangata ka lipompo tsa rotary vane nakong ea mohato oa vacuum o mahareng ho ntlafatsa lebelo la ho pompa le ho fokotsa nako ea ho theola pompo pele ho penta.
5. Lipompo tsa Turbo Molecular
Li tsebahala ka lebelo le phahameng la ho pompa le ts'ebetso e tsitsitseng, li sebelisoa haholo lits'ebetsong tsa semiconductor, optical, le tsa bongaka tse hlokang tlhahiso e tsoelang pele.
Maemo a Kopo a Che.2 ho Koahela ka Vacuum
Litlhophiso tse fapaneng tsa pompo ea vacuum li sebelisoa mekhahlelong e fapaneng ea ho roala:
Mokhahlelo oa Pele oa ho Pompa: Lipompo tsa mechine (mohlala, rotary vane, lipompo tse omileng) li fokotsa khatello ea kamore ka potlako.
Mokhahlelo o Mahareng oa Vacuum: Lipompo tsa metso li ntlafatsa katleho ea ho ntša metsi.
Sethaleng sa Vacuum e Phahameng: Lipompo tsa Turbomolecular/Turbo li theha tikoloho e hlokahalang ea vacuum e phahameng.
Mekhoa e Ikhethang ea ho Koahela: Ho qhalana ha magnetron le mouoane oa E-beam ho hloka litsamaiso tse se nang oli kapa lipompo tse omileng tse sebetsang hantle ho netefatsa bohloeki ba filimi.
Khetho ea pompo e tlameha ho nahana ka mofuta oa thepa, mocheso oa ts'ebetso, botenya ba filimi, le bophahamo ba sistimi ho fihlela litlhoko tse ikhethileng tsa boemo ba vacuum le bohloeki.
3 Ho Khetha Sistimi e Molemohali ea Pompo ea Vacuum
Sistimi e ntle ea ho pompa ka vacuum e lokela ho ba le:
Lebelo la ho pompa le tsamaellana le bophahamo ba kamore
Ho fihlella sepheo sa ho hloka lesoba la ho qetela
Ts'ebetso e tsitsitseng ka tlhokomelo e tlase
Tshebetso e se nang oli le e se nang dikarolwana
Ho latela maemo a tikoloho le matla
Bakeng sa dikopo tse nepahetseng tsa ho roala tsa optical, semiconductor, kapa mekhabiso, ho kgothaletswa motswako wa mekhahlelo e meraro (Dry Pump + Roots Pump + Turbomolecular Pump).
Le hoja lipompo tsa vacuum li le nyane, li bohlokoa bakeng sa litsamaiso tsa ho roala ka vacuum. Khetho le tlhophiso e nepahetseng ea pompo li ntlafatsa boleng ba filimi, katleho ea sistimi, nako ea bophelo ea lisebelisoa le katleho ea litšenyehelo. Ikopanye le Zhenhua Vacuum bakeng sa litharollo tsa vacuum tse etselitsoeng litlhoko tsa hau tsa ho roala.
-Sengoloa sena se lokollotsoe ke moetsi oa mochini oa ho roala ka vacuum cleaner Mochini o hloekisang oa Zhenhua.
Nako ea poso: Phuptjane-14-2025
