Mu buryo bwo gusiga irangi ry’imyanda, pompe zikoresha irangi ry’imyanda zifite uruhare runini. Ni ibintu by'ingenzi kugira ngo hagerwe ku bidukikije bifite irangi ryinshi rikenewe mu gusiga irangi, bigira ingaruka ku buryo butaziguye ku mikorere yo gusiga irangi, ubwiza bwa filime, no ku musaruro. Uburyo butandukanye bwo gusiga irangi bufite ibisabwa bitandukanye ku rwego rwo gusiga irangi ry’imyanda, bigatuma guhitamo irangi ry’imyanda bikwiye ari ingenzi. Nk'uruganda rukora ibikoresho bikoresha irangi ry’imyanda, Zhenhua Vacuum itanga isesengura ryimbitse ry’ubwoko bw’irangi ry’imyanda rikoreshwa mu ikoranabuhanga ryo gusiga irangi.
Ubwoko bwa 1 bw'amapompo akoresha umwuka ushyushye
Hashingiwe ku mahame y'imikorere, pompe zikoresha umwuka zishobora gushyirwa mu byiciro bikurikira:
1. Pompe za Mekanike (Pompe zo ku rwego rwo hejuru)
Ikoreshwa cyane cyane mu gukura sisitemu mu kirere zijya mu cyuma gito (10⁻¹ ~ 10⁻³ Pa), akenshi ikoreshwa nk'imashini zifasha mu gukora imashini zikoresha imashini nyinshi zikoresha imashini nyinshi.
Pompe za Rotary Vane: Igishushanyo mbonera gito, byoroshye kubungabunga, kibereye sisitemu nto zo gusigaho irangi.
Pompe zumutse zikoresha screw: Ikoreshwa ridafite amavuta, ni ryiza cyane ku bikoresho bisukuye bifite isuku nyinshi.
2. Pompe za Turbomolecular (Pompe zifite umwuka mwinshi)
Ishobora kugera ku mvange ikomeye cyane (≤10⁻⁶ Pa), akenshi ihuzwa n'imashini zikoresha PVD (Physical Vapor Deposition) na CVD (Chemical Vapor Deposition). Itanga imiterere myiza kandi ihamye y'imyanda myinshi, bigatuma iba ingenzi mu buryo bwo gusiga neza cyane.
3. Pompe zo gukwirakwiza amazi
Nubwo zishobora kugera kuri 10⁻⁶ Pa, kwanduzwa n'umwuka w'amavuta bigabanya ikoreshwa ryazo mu gusiga irangi ry'urumuri n'ibindi bikoresho bifite isuku nyinshi. Bigenda bisimburana n'imashini zikoresha turbomolecular mu nganda zisiga irangi.
4. Pompe z'imizi (Pompe zongerera imbaraga)
Ikoreshwa cyane hamwe n'imashini zizunguruka mu gihe cy'ingufu ziciriritse kugira ngo yongere umuvuduko wo gupompa no kugabanya igihe cyo kugabanya imashini mbere yo gusiga irangi.
5. Pompe za Turbo Molecular
Zizwiho umuvuduko mwinshi wo kompanyi no gukora neza, zikoreshwa cyane mu gusiga irangi rya semiconductor, optique, na medical coating bisaba gukorwa buri gihe.
Uburyo bwa 2 bwo gukoresha mu gusiga irangi ry'ubushyuhe
Imiterere itandukanye ya pompe y'umwuka ikoreshwa mu byiciro bitandukanye byo gusiga:
Icyiciro cya mbere cyo kuvoma: Pompe za mechanical (urugero, rotary vane, pompe zumutse) zigabanya vuba umuvuduko w'icyumba.
Icyiciro cy'imyanda kiri hagati: Imashini zikoresha imizi zituma habaho imikorere myiza yo kwimura abantu.
Icyiciro cy'ingufu nyinshi: Pompe za Turbomolecular/Turbo zishyiraho ahantu hakenewe ingufu nyinshi.
Uburyo bwihariye bwo gutwikira: Gutera amashanyarazi ya Magnetron no gusohora umwuka wa E-beam bisaba sisitemu zidafite amavuta cyangwa pompe zumutse zikora neza kugira ngo firime ibe nziza.
Guhitamo pompe bigomba kuzirikana ubwoko bw'ibikoresho, ubushyuhe bw'imikorere, ubugari bwa firime, n'ingano ya sisitemu kugira ngo byuzuze urwego rwihariye rw'ubushyuhe n'ibisabwa mu isuku.
No.3 Guhitamo Sisitemu Nziza yo Gukoresha Imashini Icana Ifu
Sisitemu nziza yo gupompa amazi mu buryo bwa vacuum igomba kuba ifite ibi bikurikira:
Umuvuduko wo gupompa uhuye n'ingano y'icyumba
Kugera ku ntego y'icyuho cy'ingenzi
Imikorere ihamye kandi idasaba ubufasha bwinshi
Imikorere idafite amavuta kandi idafite uduce duto
Iyubahirizwa ry'amahame ngenderwaho y'ibidukikije n'ingufu
Ku bijyanye no gukoresha neza irangi ry’amatara, semiconductor, cyangwa imitako, ni byiza gukoresha irangi ry’icyiciro bitatu (Dry Pump + Roots Pump + Turbomolecular Pump).
Nubwo ari nto, pompe zikoresha umwuka uvamo umwuka ni ingenzi cyane kuri sisitemu zo gusiga irangi ry’umwuka uvamo umwuka. Guhitamo no gushyiraho neza pompe byongera ireme rya firime, imikorere myiza ya sisitemu, igihe cyo gukoresha ibikoresho, no kugabanya ikiguzi. Hamagara Zhenhua Vacuum kugira ngo ubone ibisubizo byihariye bya pompe zikoresha umwuka uvamo umwuka bihuye n'ibyo ukeneye mu gusiga irangi.
-Iyi nkuru yasohotse na uruganda rukora imashini zikora imashini zikoresha umwuka ushyushye Zhenhua Vacuum.
Igihe cyo kohereza: Kamena-14-2025