Kwiinkqubo zokugquma nge-vacuum, iimpompo ze-vacuum zidlala indima ebalulekileyo. Zizinto ezibalulekileyo ekufezekiseni imeko-bume ye-vacuum ephezulu efunekayo kwiinkqubo zokugquma, nto leyo echaphazela ngokuthe ngqo ukusebenza kakuhle kokugquma, umgangatho wefilimu, kunye nemveliso. Iinkqubo ezahlukeneyo zokugquma zinemfuno ezahlukeneyo ze-vacuum, nto leyo eyenza ukuba ukukhetha ipompo ngokufanelekileyo kube yinto ebalulekileyo. Njengomvelisi wezixhobo zokugquma nge-vacuum ophambili, i-Zhenhua Vacuum inikezela ngohlalutyo olupheleleyo lweentlobo eziphambili zeempompo ze-vacuum kunye nezicelo zazo ezithile kubuchwepheshe bokugquma.
Udidi lweNombolo 1 lweeMpompo zeVacuum
Ngokusekelwe kwimigaqo yokusebenza, iimpompo ze-vacuum zingahlulwahlulwa ngolu hlobo lulandelayo:
1. Iimpompo zoomatshini (iiMpompo zangaphambili)
Ngokuyintloko isetyenziselwa ukukhupha iinkqubo ukusuka kuxinzelelo lomoya ukuya kwi-vacuum ephantsi (10⁻¹ ~ 10⁻³ Pa), ngokuqhelekileyo isebenza njengeempompo ezixhasayo zeempompo ezine-vacuum ephezulu.
Iimpompo zeRotary Vane: Uyilo oluncinci, kulula ukulugcina, lufanelekile kwiinkqubo zokugquma ezincinci.
Iimpompo zeSkruwu ezomileyo: Ukusebenza okungenaoyile, kufanelekile kwiinkqubo zevacuum ezicocekileyo ezineemfuno zobumsulwa obuphezulu.
2. Iimpompo zeTurbomolecular (Iimpompo ezineVacuum ephezulu)
Ziyakwazi ukufikelela kwi-vacuum ephezulu kakhulu (≤10⁻⁶ Pa), zihlala zidibene neempompo zoomatshini zeenkqubo ze-PVD (Physical Vapor Deposition) kunye ne-CVD (Chemical Vapor Deposition). Zibonelela ngeemeko ezicocekileyo nezizinzileyo ze-vacuum ephezulu, nto leyo ezenza zibe yinxalenye ephambili kwiinkqubo zokugquma ezichanekileyo.
3. Iimpompo zokusasazwa
Nangona zikwazi ukufikelela kwi-10⁻⁶ Pa, ungcoliseko lomphunga weoyile luthintela ukusetyenziswa kwazo kwiingubo zokukhanya nakwezinye izinto ezicocekileyo kakhulu. Zithatyathelwa indawo ngakumbi ziipompo ze-turbomolecular kwiinkqubo zokugquma zoshishino.
4. Iimpompo zeengcambu (iiMpompo zokunyusa)
Isetyenziswa rhoqo kwiimpompo ze-rotary vane ngexesha lesigaba se-vacuum esiphakathi ukuphucula isantya sokumpompa nokunciphisa ixesha lokupompa ngaphambi kokugquma.
5. Iimpompo zeTurbo Molecular
Zaziwa ngesantya esiphezulu sokupompa kunye nokusebenza okuzinzileyo, zisetyenziswa kakhulu kwizicelo ze-semiconductor, i-optical, kunye ne-medical coating ezifuna ukuveliswa rhoqo.
Imizekelo yesicelo seNombolo 2 kwiVacuum Coating
Iinkqubo ezahlukeneyo zepompo ye-vacuum zisetyenziswa kwizigaba ezahlukeneyo zokugquma:
Inqanaba Lokuqala Lokupompa: Iimpompo zoomatshini (umz., i-rotary vane, iimpompo ezomileyo) zinciphisa ngokukhawuleza uxinzelelo lwegumbi.
Inqanaba Eliphakathi Lokungcolisa Uthuli: Iimpompo zeengcambu ziphucula ukusebenza kakuhle kokukhupha umoya.
Inqanaba le-High-Vacuum: Iipompo ze-Turbomolecular/Turbo ziseka indawo efunekayo ye-high-vacuum.
Iinkqubo Ezikhethekileyo Zokugquma: Ukutshiza ngeMagnetron kunye nokuphuma komoya kwi-E-beam kufuna iinkqubo ezingenayo ioyile okanye iimpompo ezomileyo ezisebenza kakuhle ukuqinisekisa ubunyulu befilimu.
Ukukhethwa kwepompo kufuneka kuqwalasele uhlobo lwezinto ezisetyenziswayo, ubushushu benkqubo, ubukhulu befilimu, kunye nomthamo wenkqubo ukuze kuhlangatyezwane neemfuno ezithile zenqanaba le-vacuum kunye nococeko.
Hayi. 3 Ukukhetha iNkqubo yePump yeVacuum efanelekileyo
Inkqubo yokupompa i-vacuum efanelekileyo kufuneka ibe nezi zinto zilandelayo:
Isantya sokumpompa sihambelana nomthamo wegumbi
Ukufezekisa isithuba esiphezulu esingenanto ekujoliswe kuyo
Ukusebenza okuzinzileyo kunye nokugcinwa okuncinci
Ukusebenza okungenaoyile kunye nokusebenza okungenamasuntswana
Ukuthobela imigangatho yokusingqongileyo kunye namandla
Kwizicelo zokugquma ezichanekileyo ze-optical, semiconductor, okanye zokuhombisa, kucetyiswa indibaniselwano enamanqanaba amathathu (iDry Pump + Roots Pump + Turbomolecular Pump).
Nangona zincinci, iimpompo ze-vacuum zibalulekile kwiinkqubo zokugquma nge-vacuum. Ukukhethwa kwempompo ngokufanelekileyo kunye noqwalaselo kuphucula umgangatho wefilimu, ukusebenza kakuhle kwenkqubo, ixesha lokusetyenziswa kwezixhobo, kunye nokusebenza kakuhle kweendleko. Nxibelelana ne-Zhenhua Vacuum ukuze ufumane izisombululo ze-vacuum ezenzelwe wena ezilungiselelwe iimfuno zakho zokugquma.
-Eli nqaku likhutshwe ngu umenzi womatshini wokugquma nge-vacuum I-Vacuum yaseZhenhua.
Ixesha leposi: Juni-14-2025