I roto i ngā pūnaha paninga korehau, he mahi nui tā ngā papu korehau. He wāhanga nui ēnei mō te whakatutuki i te taiao korehau teitei e hiahiatia ana mō ngā tukanga paninga, e pā tika ana ki te pai o te paninga, te kounga kiriata, me te hua whakaputa. He rerekē ngā whakaritenga taumata korehau o ngā tukanga paninga rerekē, he mea nui te whiriwhiri papu tika. Hei kaihanga taputapu paninga korehau matua, ka whakaratohia e Zhenhua Vacuum he tātaritanga whānui o ngā momo papu korehau matua me ō rātou tono motuhake i roto i ngā hangarau paninga.
Nama 1 Whakarōpūtanga o ngā Papu Korehau
I runga i ngā mātāpono mahi, ka taea te whakarōpū i ngā papu korehau penei:
1. Ngā Papu Mīhini (Ngā Papu o Mua)
E whakamahia ana hei tango i ngā pūnaha mai i te pēhanga hau ki te pēhanga iti (10⁻¹ ~ 10⁻³ Pa), ā, ko te tikanga he papu tautoko mō ngā papu korehau-nui.
Ngā Papu Waewae Hurihuri: He hoahoa kiato, he ngāwari te tiaki, he pai mō ngā pūnaha paninga iti.
Ngā Papu Tīwiri Maroke: Mahi kore-hinu, he mea tino pai mō ngā pūnaha korehau ma me ngā whakaritenga parakore teitei.
2. Ngā Papu Turbomolecular (Ngā Papu Korehau-Tiketike)
Ka taea te whakatutuki i te korehau tino teitei (≤10⁻⁶ Pa), he maha ngā wā ka honoa ki ngā papu miihini mō ngā tukanga PVD (Te Whakatakotoranga Kohu Tinana) me CVD (Te Whakatakotoranga Kohu Matū). Ka whakaratohia e rātou he āhuatanga korehau teitei ma, pumau, ka waiho hei wāhanga matua i roto i ngā pūnaha paninga tino tika.
3. Ngā Papu Horohoro
Ahakoa e taea ana te eke ki te 10⁻⁶ Pa, ka whakawhāitihia e te poke o te kohu hinu te whakamahinga i roto i ngā paninga whatu me ētahi atu tono parakore teitei. Kei te piki haere te whakakapinga e ngā papu turbomolecular i roto i ngā pūnaha paninga ahumahi.
4. Ngā Papu Roots (Ngā Papu Whakakaha)
E whakamahia whānuitia ana me ngā papu hurihuri i te wā e whakamahia ana te korehau waenga hei whakapai ake i te tere papu me te whakaiti i te wā whakamutu papu i mua i te paninga.
5. Ngā Papu Ngota Turbo
E mōhiotia ana mō te tere papu teitei me te mahi pumau, e whakamahia whānuitia ana i roto i ngā tono paninga haurua-ira, whatu, me te hauora e hiahia ana ki te whakaputa tonu.
Ngā Horopaki Taupānga Nama 2 i roto i te Paninga Korehau
He rerekē ngā momo whirihoranga papu korehau e whakamahia ana i ngā wāhanga paninga rerekē:
Wāhanga Papu Tuatahi: Ka tere te whakaiti a ngā papu miihini (hei tauira, te vane hurihuri, ngā papu maroke) i te pēhanga o te rūma.
Wāhanga Korehau-Waenga: Ka whakapai ake ngā papu pakiaka i te whai huatanga o te whakakorenga.
Wāhanga Korehau-Tiketike: Mā ngā papu Turbomolecular/Turbo ka whakatū te taiao korehau-tiketike e hiahiatia ana.
Ngā Tukanga Paninga Motuhake: Ko te pupuhi Magnetron me te mimiti E-beam e hiahia ana ki ngā pūnaha kore-hinu, ngā papu maroke mahi-teitei rānei hei whakarite i te parakore o te kiriata.
Me whai whakaaro te kōwhiringa papu ki te momo rauemi, te pāmahana tukanga, te matotoru o te kiriata, me te rōrahi pūnaha kia tutuki ai ngā whakaritenga motuhake mō te taumata korehau me te ma.
Nama 3 Te Kōwhiri i tētahi Pūnaha Papu Korehau Tino Pai
Me whai i tētahi pūnaha papu korehau pai:
Te tere o te papu e rite ana ki te rōrahi o te rūma
Te whakatutukitanga o te korehau mutunga whainga
Te mahi pumau me te iti o te tiaki
Mahi kore-hinu, kore-matūriki
Te tutuki i ngā paerewa taiao me te pūngao
Mō ngā paninga whatu tino tika, paninga haurua-ira, paninga whakapaipai rānei, e taunakihia ana kia whakamahia he huinga wāhanga-toru (Papu Maroke + Papu Pūtake + Papu Turbomolecular).
Ahakoa he iti, he mea nui ngā papu korehau ki ngā pūnaha paninga korehau. Mā te whiriwhiri me te whirihoranga tika o te papu ka pai ake te kounga o te kiriata, te whai huatanga o te pūnaha, te roa o te ora o ngā taputapu, me te whai huatanga o te utu. Whakapā atu ki a Zhenhua Vacuum mō ngā otinga korehau kua whakaritea kia rite ki ō hiahia paninga.
-Nā te kaihanga mīhini paninga korehau Pūrere horoi horoi Zhenhua.
Wā tuku: Pipiri-14-2025