Enqubweni yokumboza nge-sputtering, ama-compounds angasetshenziswa njengezinhloso zokulungiselela amafilimu enziwe ngamakhemikhali. Kodwa-ke, ukwakheka kwefilimu ekhiqizwa ngemva kokuphaza kwezinto eziqondiwe kuvame ukuhluka kakhulu ekwakhiweni kokuqala kwezinto eziqondiwe, ngakho-ke akuhlangabezani nezidingo zomklamo wokuqala. Uma kusetshenziswa i-target yensimbi emsulwa, igesi esebenzayo edingekayo (isb., i-oxygen lapho kulungiswa amafilimu e-oxide) ixutshwa ngamabomu kugesi osebenzayo (okhiphayo), ukuze isabela ngamakhemikhali nezinto eziqondiwe ukuze ikhiqize ifilimu encane engalawulwa ngokwesakhiwo sayo kanye nezici zayo. Le ndlela ivame ukubizwa ngokuthi “i-reaction sputtering”.
Njengoba kushiwo ngaphambili, ukusputtering kwe-RF kungasetshenziswa ukufaka amafilimu e-dielectric kanye namafilimu ahlukahlukene ahlanganisiwe. Kodwa-ke, ukuze kulungiselelwe ifilimu "emsulwa", kuyadingeka ukuba nenhloso "emsulwa", i-oxide ehlanzekile kakhulu, i-nitride, i-carbide, noma enye i-powder ehlanganisiwe. Ukucubungula lawa ma-powders abe yinhloso yesimo esithile kudinga ukwengezwa kwezithasiselo ezidingekayo ekubunjweni noma ekushiseni, okuholela ekunciphiseni okukhulu kokuhlanzeka kwenhloso kanye nefilimu ephumayo. Nokho, ekusputtering okusebenzayo, njengoba izinsimbi ezihlanzekile kakhulu namagesi ahlanzekile kakhulu zingasetshenziswa, kuhlinzekwa izimo ezilula zokulungiselela amafilimu ahlanzekile kakhulu. Ukusputtering okusebenzayo kuthole ukunakwa okwandayo eminyakeni yamuva futhi sekuyindlela enkulu yokwandisa amafilimu amancane amakhemikhali ahlukahlukene asebenzayo. Isetshenziswe kabanzi ekwenziweni kwama-compound e-IV, I- kanye ne-IV-V, ama-semiconductor aphikisayo, kanye nama-oxide ahlukahlukene, njengokusetshenziswa kwengxube yamagesi e-polycrystalline Si kanye ne-CH./Ar ukudubula ukukhukhuleka kwamafilimu amancane e-SiC, i-Ti target kanye ne-N/Ar ukulungiselela amafilimu aqinile e-TiN, i-Ta kanye ne-O/Ar ukulungiselela i-TaO; amafilimu amancane e-dielectric, i-Fe kanye ne-O,/Ar ukulungiselela amafilimu okurekhoda e-FezO; i-FezO., amafilimu e-AIN piezoelectric ane-A1 kanye ne-N/Ar, amafilimu okukhetha okumunca e-A1-CO ane-AI kanye ne-CO/Ar, kanye namafilimu e-YBaCuO-superconducting ane-Y-Ba-Cu kanye ne-O/Ar, phakathi kwezinye.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Jan-18-2024