Nā ʻano a me nā noi o ka Reactive Sputtering Coating

I ke kaʻina hana uhi sputtering, hiki ke hoʻohana ʻia nā hui ma ke ʻano he mau pahuhopu no ka hoʻomākaukau ʻana i nā kiʻiʻoniʻoni i hana ʻia me ke kemika. Eia nō naʻe, ʻo ke ʻano o ke kiʻiʻoniʻoni i hana ʻia ma hope o ka sputtering o ka mea pahuhopu e ʻokoʻa pinepine mai ka hoʻonohonoho mua o ka mea pahuhopu, a no laila ʻaʻole ia e hoʻokō i nā koi o ka hoʻolālā mua. Inā hoʻohana ʻia kahi pahuhopu metala maʻemaʻe, ua hui pū ʻia ke kinoea hana e pono ai (e laʻa, oxygen i ka wā e hoʻomākaukau ai i nā kiʻiʻoniʻoni oxide) i loko o ke kinoea hana (hoʻokuʻu), i mea e pane ai i ke kemika me ka mea pahuhopu e hana i kahi kiʻiʻoniʻoni lahilahi hiki ke hoʻomalu ʻia ma ke ʻano o kona ʻano a me nā ʻano. Ua kapa pinepine ʻia kēia ʻano hana ʻo "reaction sputtering".

E like me ka mea i ʻōlelo ʻia ma mua, hiki ke hoʻohana ʻia ka RF sputtering e waiho i nā kiʻiʻoniʻoni dielectric a me nā kiʻiʻoniʻoni hui like ʻole. Eia nō naʻe, i mea e hoʻomākaukau ai i kahi kiʻiʻoniʻoni "maʻemaʻe", pono e loaʻa kahi pahuhopu "maʻemaʻe", kahi oxide maʻemaʻe kiʻekiʻe, nitride, carbide, a i ʻole ka pauka hui ʻē aʻe. ʻO ka hana ʻana i kēia mau pauka i loko o kahi pahuhopu o kekahi ʻano e pono ai ka hoʻohui ʻana o nā mea hoʻohui e pono ai no ka hoʻoheheʻe ʻana a i ʻole ka sintering, kahi e hopena ai i ka emi nui ʻana o ka maʻemaʻe o ka pahuhopu a me ke kiʻiʻoniʻoni hopena. I ka reactive sputtering, akā naʻe, ʻoiai hiki ke hoʻohana ʻia nā metala maʻemaʻe kiʻekiʻe a me nā kinoea maʻemaʻe kiʻekiʻe, ua hāʻawi ʻia nā kūlana kūpono no ka hoʻomākaukau ʻana i nā kiʻiʻoniʻoni maʻemaʻe kiʻekiʻe. Ua loaʻa i ka reactive sputtering ka nānā nui ʻana i nā makahiki i hala iho nei a ua lilo ia i ʻano hana nui no ka hoʻoheheʻe ʻana i nā kiʻiʻoniʻoni lahilahi o nā hui hana like ʻole. Ua hoʻohana nui ʻia ia i ka hana ʻana o nā hui IV, I- a me IV-V, nā semiconductors refractory, a me nā ʻano oxides like ʻole, e like me ka hoʻohana ʻana i ka hui polycrystalline Si a me CH./Ar o nā kinoea e pana i ka ua o nā kiʻiʻoniʻoni lahilahi SiC, Ti target a me N/Ar e hoʻomākaukau i nā kiʻiʻoniʻoni paʻakikī TiN, Ta a me O/Ar e hoʻomākaukau iā TaO; nā kiʻiʻoniʻoni lahilahi dielectric, Fe a me O,/Ar e hoʻomākaukau i ka -FezO; -FezO. nā kiʻiʻoniʻoni hoʻopaʻa leo, nā kiʻiʻoniʻoni piezoelectric AIN me A1 a me N/Ar, nā kiʻiʻoniʻoni absorption koho A1-CO me AI a me CO/Ar, a me nā kiʻiʻoniʻoni superconducting YBaCuO me Y-Ba-Cu a me O/Ar, a me nā mea ʻē aʻe.

–Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini uhi hakahakaGuangdong Zhenhua