Mukuita kwekuputira simbi, makemikari anogona kushandiswa sezvinangwa zvekugadzirira mafirimu akagadzirwa nemakemikari. Zvisinei, kuumbwa kwefirimu rinogadzirwa mushure mekuputira simbi rinowanzosiyana zvakanyanya nekugadzirwa kwekutanga kwesimbi, uye nekudaro harina kuzadzisa zvinodiwa zvekugadzirwa kwekutanga. Kana chinangwa chesimbi chakachena chikashandiswa, gasi rinoita basa (semuenzaniso, oxygen pakugadzira mafirimu eoxide) rinosanganiswa nemaune mugasi rinoshanda (recharge), kuitira kuti riite makemikari nechinhu chinotarirwa kuti rigadzire firimu rakatetepa rinogona kudzorwa maererano nekuumbwa kwaro uye hunhu hwaro. Nzira iyi inowanzonzi "reaction sputtering".
Sezvambotaurwa, RF sputtering inogona kushandiswa kuisa mafirimu e dielectric nemafirimu akasiyana-siyana. Zvisinei, kuti ugadzire firimu "rakachena", zvinodiwa kuti uve nechinangwa "chakachena", high-purity oxide, nitride, carbide, kana imwe compound powder. Kugadzira mapoda aya kuita chinangwa chechimiro chakati kunoda kuwedzerwa zvimwe zvinhu zvinodiwa pakuumba kana kusvina, izvo zvinoita kuti kuchena kwechinangwa nefirimu rinobuda kuderera zvakanyanya. Zvisinei, mukusvina kwe reactive, sezvo simbi dzakachena zvakanyanya nemagasi akachena zvakanyanya zvinogona kushandiswa, mamiriro ezvinhu akakodzera anopiwa ekugadzirira mafirimu akachena zvakanyanya. Reactive sputtering yave ichinyanya kutariswa mumakore achangopfuura uye yave nzira huru yekusvina mapoda matete emakombiyumu akasiyana-siyana anoshanda. Yakashandiswa zvakanyanya mukugadzira ma IV, I- uye IV-V compounds, refractory semiconductors, uye akasiyana-siyana ma oxides, akadai sekushandisa polycrystalline Si uye CH./Ar musanganiswa wemagasi kupfura mvura yeSiC thin films, Ti target uye N/Ar kugadzirira TiN hard films, Ta uye O/Ar kugadzirira TaO; dielectric thin films, Fe uye O,/Ar kugadzirira -FezO; -FezO. mafirimu ekurekodha, AIN piezoelectric films ane A1 uye N/Ar, A1-CO selective absorption films ane AI uye CO/Ar, uye YBaCuO-superconducting films ane Y-Ba-Cu uye O/Ar, pakati pemamwe.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingGuangdong Zhenhua
Nguva yekutumira: Ndira-18-2024