Makhalidwe ndi Mapulogalamu Othandizira Othandizira Kupopera Ma Sputtering

Mu ndondomeko yopaka utoto, mankhwala angagwiritsidwe ntchito ngati zolinga zokonzekera mafilimu opangidwa ndi mankhwala. Komabe, kapangidwe ka filimu yopangidwa pambuyo popaka utoto wa zinthu zomwe mukufuna nthawi zambiri kamasiyana kwambiri ndi kapangidwe koyambirira ka zinthu zomwe mukufuna, motero sikukwaniritsa zofunikira za kapangidwe koyambirira. Ngati chandamale chachitsulo choyera chikugwiritsidwa ntchito, mpweya wofunikira (monga mpweya pokonzekera mafilimu a oxide) umasakanizidwa mwadala mu mpweya wogwira ntchito (wotulutsa), kotero kuti umakhudzana ndi mankhwala ndi zinthu zomwe mukufuna kuti upange filimu yopyapyala yomwe ingawongoleredwe malinga ndi kapangidwe kake ndi makhalidwe ake. Njirayi nthawi zambiri imatchedwa "reaction sputtering".

Monga tanenera kale, kupopera kwa RF kungagwiritsidwe ntchito kuyika mafilimu a dielectric ndi mafilimu osiyanasiyana ophatikizika. Komabe, kuti mukonze filimu "yoyera", ndikofunikira kukhala ndi cholinga "choyera", oxide woyera kwambiri, nitride, carbide, kapena ufa wina wophatikizika. Kukonza ufa uwu kukhala cholinga cha mawonekedwe enaake kumafuna kuwonjezera zowonjezera zofunika pakuumba kapena kusungunula, zomwe zimapangitsa kuti kuyera kwa cholingacho kuchepe kwambiri. Komabe, pakupopera kobwerezabwereza, popeza zitsulo zoyera kwambiri ndi mpweya woyera kwambiri zingagwiritsidwe ntchito, mikhalidwe yabwino imaperekedwa pokonzekera mafilimu oyera kwambiri. Kupopera kobwerezabwereza kwakhala kukuyang'aniridwa kwambiri m'zaka zaposachedwa ndipo kwakhala njira yayikulu yopangira mafilimu owonda amitundu yosiyanasiyana yogwira ntchito. Yagwiritsidwa ntchito kwambiri popanga ma IV, I- ndi IV-V compounds, ma refractory semiconductors, ndi ma oxides osiyanasiyana, monga kugwiritsa ntchito polycrystalline Si ndi CH./Ar osakaniza mpweya kuti awononge mpweya wa SiC thin films, Ti target ndi N/Ar kuti akonze mafilimu olimba a TiN, Ta ndi O/Ar kuti akonze TaO; dielectric thin films, Fe ndi O,/Ar kuti akonze -FezO; -FezO. mafilimu ojambulira, AIN piezoelectric films with A1 and N/Ar, A1-CO selective absorption films with AI and CO/Ar, ndi YBaCuO-superconducting films with Y-Ba-Cu and O/Ar, pakati pa ena.

– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua