Imiterere n'Imikoreshereze y'Icyuma cyo Gusiga Indabyo mu Mutwe

Mu gikorwa cyo gusiga imvange, imvange zishobora gukoreshwa nk'intego zo gutegura filime zakozwe mu buryo bwa shimi. Ariko, imiterere ya filime ikorwa nyuma yo gusiga imvange y'ibikoresho bigamije akenshi itandukana cyane n'imiterere y'umwimerere y'ibikoresho bigamije, bityo ntiyujuje ibisabwa mu gishushanyo mbonera cya mbere. Iyo hakoreshejwe intego y'icyuma gikozwe neza, gazi ikenewe (urugero: ogisijeni mu gihe cyo gutegura filime za oxide) ivangwa mu buryo buzwi na buri wese muri gazi ikora (isohoka), ku buryo igirana imikorere ya shimi n'ibikoresho bigamije kugira ngo ikore filime nto ishobora kugenzurwa hakurikijwe imiterere yayo n'imiterere yayo. Ubu buryo bukunze kwitwa "reaction sputtering".

Nkuko byavuzwe mbere, RF sputtering ishobora gukoreshwa mu gushyiramo filime za dielectric na filime zitandukanye. Ariko, kugira ngo hategurwe filime "yuzuye", ni ngombwa kugira intego "yuzuye", okiside ifite ubuziranenge bwinshi, nitride, karubide, cyangwa indi fu y'ubuziranenge. Gutunganya izi fu mu gice cy'ishusho runaka bisaba kongeramo inyongera zikenewe mu gushushanya cyangwa gusya, bigatuma ubuziranenge bw'ikintu n'ifi ivamo bugabanuka cyane. Ariko, mu gusya, kubera ko ibyuma bifite ubuziranenge bwinshi n'imyuka ifite ubuziranenge bwinshi bishobora gukoreshwa, hashyirwaho uburyo bworoshye bwo gutegura filime zifite ubuziranenge bwinshi. Gusya sputtering byarushijeho kwitabwaho mu myaka ya vuba aha kandi byabaye uburyo bukomeye bwo gutuma filime nto z'ibintu bitandukanye bikora neza. Yakoreshejwe cyane mu gukora imvange za IV, I- na IV-V, semiconductors zirwanya ubushyuhe, n'ubwoko butandukanye bwa okiside, nko gukoresha uruvange rwa polycrystalline Si na CH./Ar rwa gaze kugira ngo hamenyekane imvura ya SiC thin films, Ti target na N/Ar kugira ngo hategurwe TiN hard films, Ta na O/Ar kugira ngo hategurwe TaO; dielectric thin films, Fe na O,/Ar kugira ngo hategurwe -FezO; -FezO. filime zo gufata amajwi, AIN piezoelectric filime hamwe na A1 na N/Ar, A1-CO selective absorption filime hamwe na AI na CO/Ar, na YBaCuO-superconducting filime hamwe na Y-Ba-Cu na O/Ar, n'izindi.

–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua