Ngā Āhuatanga me ngā Whakamahinga o te Paninga Reactive Sputtering

I roto i te tukanga paninga mirumiru, ka taea te whakamahi i ngā matū hei whāinga mō te whakarite i ngā kiriata i hangaia i roto i te matū. Heoi, ko te hanganga o te kiriata i hangaia i muri i te mirumiru o te rauemi whāinga he maha ngā wā ka tino rerekē mai i te hanganga taketake o te rauemi whāinga, ā, nō reira kāore e tutuki i ngā whakaritenga o te hoahoa taketake. Mena ka whakamahia he whāinga konganuku parakore, ka whakaranua ā-hinengaro te hau hohe e hiahiatia ana (hei tauira, te hāora i te wā e whakarite ana i ngā kiriata waikura) ki roto i te hau mahi (tukunga), kia tauhohe matū ai ki te rauemi whāinga hei whakaputa i tētahi kiriata angiangi ka taea te whakahaere i runga i tōna hanganga me ōna āhuatanga. Ka kiia tēnei tikanga ko te "reaction sputtering".

E ai ki te kōrero i mua ake nei, ka taea te whakamahi i te RF sputtering hei whakatakoto i ngā kiriata dielectric me ngā momo kiriata pūhui. Heoi, hei whakarite i tētahi kiriata "parakore", me whai ūnga "parakore", he waikura parakore teitei, he nitride, he carbide, he paura pūhui rānei. Ko te tukatuka i ēnei paura ki tētahi ūnga o tētahi āhua me tāpiri atu ngā tāpiringa e tika ana mō te whakakoi, te sintering rānei, ka hua ake he whakahekenga nui i te parakore o te ūnga me te kiriata hua. Heoi, i roto i te sputtering tauhohe, nā te mea ka taea te whakamahi i ngā konganuku parakore teitei me ngā hau parakore teitei, ka whakaratohia ngā āhuatanga watea mō te whakarite i ngā kiriata parakore teitei. Kua piki haere te aro ki te sputtering tauhohe i ngā tau tata nei, ā, kua waiho hei tikanga nui mō te whakapūtā i ngā kiriata angiangi o ngā momo pūhui mahi. Kua whānuitia te whakamahinga i roto i te hanga i ngā matū IV, I- me te IV-V, ngā haurua-ātete, me ngā momo waikura, pērā i te whakamahinga o te ranunga hau polycrystalline Si me te CH./Ar hei pupuhi i te maturuturunga o ngā kiriata angiangi SiC, te Ti target me te N/Ar hei whakarite i ngā kiriata mārō TiN, te Ta me te O/Ar hei whakarite i te TaO; ngā kiriata angiangi dielectric, te Fe me te O,/Ar hei whakarite i te -FezO; ngā kiriata hopu -FezO., ngā kiriata piezoelectric AIN me te A1 me te N/Ar, ngā kiriata mimiti whiriwhiri A1-CO me te AI me te CO/Ar, me ngā kiriata superconducting YBaCuO me te Y-Ba-Cu me te O/Ar, me ētahi atu.

–Nā tekaihanga mīhini paninga korehauGuangdong Zhenhua