Cov yam ntxwv thiab daim ntawv thov ntawm Reactive Sputtering Coating

Hauv cov txheej txheem sputtering, cov tshuaj sib xyaw ua ke tuaj yeem siv ua lub hom phiaj rau kev npaj cov yeeb yaj kiab synthesized. Txawm li cas los xij, cov khoom sib xyaw ntawm cov yeeb yaj kiab tsim tom qab sputtering ntawm cov khoom siv feem ntau deviates ntau ntawm cov khoom sib xyaw thawj ntawm cov khoom siv hom phiaj, thiab yog li ntawd tsis ua raws li qhov yuav tsum tau ua ntawm tus qauv tsim thawj. Yog tias siv lub hom phiaj hlau ntshiab, cov roj ua haujlwm xav tau (piv txwv li, oxygen thaum npaj cov yeeb yaj kiab oxide) yog sib xyaw ua ke rau hauv cov roj ua haujlwm (tso tawm), yog li nws reacts chemically nrog cov khoom siv hom phiaj los tsim cov yeeb yaj kiab nyias uas tuaj yeem tswj tau raws li nws cov khoom sib xyaw thiab cov yam ntxwv. Txoj kev no feem ntau hu ua "reaction sputtering".

Raws li tau hais ua ntej lawm, RF sputtering siv tau los tso cov yeeb yaj kiab dielectric thiab ntau yam yeeb yaj kiab sib xyaw. Txawm li cas los xij, txhawm rau npaj cov yeeb yaj kiab "ntshiab", nws yog qhov tsim nyog kom muaj lub hom phiaj "ntshiab", cov oxide siab-purity, nitride, carbide, lossis lwm yam hmoov sib xyaw. Kev ua cov hmoov no rau hauv lub hom phiaj ntawm ib qho duab yuav tsum tau ntxiv cov khoom ntxiv uas tsim nyog rau kev molding lossis sintering, uas ua rau muaj kev txo qis ntawm qhov huv ntawm lub hom phiaj thiab cov yeeb yaj kiab tshwm sim. Hauv kev sib xyaw ua ke, txawm li cas los xij, txij li thaum cov hlau siab-purity thiab cov pa roj siab-purity tuaj yeem siv tau, cov xwm txheej yooj yim tau muab rau kev npaj cov yeeb yaj kiab siab-purity. Reactive sputtering tau txais kev saib xyuas ntau ntxiv hauv xyoo tas los no thiab tau dhau los ua ib txoj hauv kev tseem ceeb rau kev ua kom cov yeeb yaj kiab nyias nyias ntawm ntau yam kev sib xyaw ua haujlwm. Nws tau siv dav hauv kev tsim cov IV, I- thiab IV-V cov khoom sib xyaw, cov khoom siv hluav taws xob refractory, thiab ntau yam oxides, xws li kev siv cov polycrystalline Si thiab CH./Ar sib xyaw ntawm cov roj los tua cov nag ntawm SiC cov yeeb yaj kiab nyias, Ti lub hom phiaj thiab N/Ar los npaj TiN cov yeeb yaj kiab nyuaj, Ta thiab O/Ar los npaj TaO; dielectric cov yeeb yaj kiab nyias, Fe thiab O,/Ar los npaj -FezO; -FezO. cov yeeb yaj kiab kaw, AIN piezoelectric cov yeeb yaj kiab nrog A1 thiab N/Ar, A1-CO xaiv cov yeeb yaj kiab nqus nrog AI thiab CO/Ar, thiab YBaCuO-superconducting cov yeeb yaj kiab nrog Y-Ba-Cu thiab O/Ar, ntawm lwm tus.

– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua