Enqubweni yokugcoba ama-sputtering, ama-compounds angasetshenziswa njengezinhloso zokulungiswa kwamafilimu ahlanganiswe ngamakhemikhali. Kodwa-ke, ukwakheka kwefilimu ekhiqizwe ngemva kokufakaza okokusebenza okuqondiwe kuvame ukuphambuka kakhulu ekwakhiweni kwasekuqaleni kwento eqondiwe, ngakho-ke ayihlangabezani nezidingo zomklamo wokuqala. Uma kusetshenziswa okuhlosiwe kwensimbi ehlanzekile, igesi esebenzayo edingekayo (isb, i-oksijini lapho kulungiselelwa amafilimu e-oxide) ixutshwa ngokuqaphela kugesi esebenzayo (yokukhipha), ukuze iphendule ngamakhemikhali nento eqondiwe ukuze ikhiqize ifilimu encane engalawulwa ngokuhambisana nokwakheka nezici zayo. Le ndlela ivame ukubizwa ngokuthi "i-reaction sputtering".
Njengoba kushiwo ngaphambili, i-RF sputtering ingasetshenziswa ukufaka amafilimu e-dielectric namafilimu ahlukahlukene ayinhlanganisela. Kodwa-ke, ukuze ulungiselele ifilimu "ehlanzekile", kuyadingeka ukuthi ube nethagethi "ehlanzekile", i-high-purity oxide, i-nitride, i-carbide, noma enye i-powder ehlanganisiwe. Ukucubungula lezi zimpushana zibe inhloso yomumo othile kudinga ukungezwa kwezithasiselo ezidingekayo ekubumbeni noma ekushiseni, okuholela ekunciphiseni okuphawulekayo kokuhlanzeka kwethagethi kanye nefilimu ewumphumela. Ekuhlahleni okusebenzayo, noma kunjalo, njengoba izinsimbi ezihlanzekile kakhulu kanye namagesi ahlanzekile angasetshenziswa, izimo ezilula zinikezwa ukulungiswa kwamafilimu ahlanzekile. I-Reactive sputtering ithole ukunakwa okukhulayo eminyakeni yamuva nje futhi isiphenduke indlela enkulu yokunciphisa amafilimu amancane ezinto ezihlukahlukene ezisebenzayo. Isetshenziswe kabanzi ekwenzeni izingxube ze-IV, i-I- ne-IV-V, ama-semiconductors e-refractory, nezinhlobonhlobo zama-oxide, njengokusetshenziswa kwengxube ye-polycrystalline Si ne-CH./Ar yamagesi ukudubula ukuna kwamafilimu amancane e-SiC, i-Ti target kanye ne-N/Ar ukulungisa amafilimu aqinile e-TiN, i-Ta ne-O/Ar ukuze kulungiswe i-TaO; amafilimu amancanyana e-dielectric, i-Fe ne-O,/Ar ukulungiselela -FezO; -FezO. amafilimu aqoshiwe, amafilimu e-AIN piezoelectric ane-A1 ne-N/Ar, amafilimu e-A1-CO akhethiwe ane-AI ne-CO/Ar, namafilimu e-YBaCuO-superconducting ane-Y-Ba-Cu ne-O/Ar, phakathi kwabanye.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Jan-18-2024