I-arc ion ye-cathode ye-vacuumcoi-ating ifushaniswe njenge-vacuum arccoUma kusetshenziswa imithombo emibili noma ngaphezulu yokuhwamuka kwe-vacuum arc (okubizwa ngokuthi imithombo ye-arc), ibizwa ngokuthi ama-multi arc ioncoukuhlanganisa noma i-multi-arccoukuhlanganisa. Kuwubuchwepheshe bokumboza ama-ion e-vacuum obusebenzisa ukukhishwa kwe-arc ye-vacuum emithonjeni yokuhwamuka. Ngokungafani ne-hot electron arc yokukhishwa kwe-cathode engenalutho, isimo sayo se-arc ukwakheka kwamabala e-arc ye-cathode ebusweni be-cathode ebandayo.
Izici ze-arc ion ye-vacuum cathodecoizici ziyi:
(1) Umthombo wokuhwamuka uwumgomo we-cathode oqinile, okhiqiza ngqo i-plasma emthonjeni oqondiwe we-cathode ngaphandle kwesidingo sechibi elincibilikisiwe. Umthombo oqondiwe we-arc ungahlelwa kunoma iyiphi indlela kanye nemithombo eminingi ukuqinisekisa ukumbozwa okufanayo.
(2) Isakhiwo semishini silula, ngaphandle kwesidingo segesi esebenzayo noma izindlela ze-ionization ezisizayo. Umthombo oqondiwe we-arc awugcini nje ngokuba umthombo wokuhwamuka kwezinto ze-cathode, kodwa futhi ungumthombo we-ion; Ngesikhathi sokufakwa kwe-reactive, kukhona igesi esabelayo kuphela, futhi umoya ulawulwa kusetshenziswa ukulawula okulula kwengcindezi egcwele.
(3) Izinga le-ionization liphezulu, ngokuvamile lifinyelela ku-60% ~ 80%, kanti izinga lokufakwa liphezulu.
(4) Amandla e-ion yesigameko aphezulu, futhi amandla okubopha ifilimu/i-substrate efilimu efakiwe mahle.
(5) Ukusebenzisa ugesi one-voltage ephansi ukuze kusebenze ngokuphephile.
(6) Ingafaka amafilimu ensimbi, amafilimu e-alloy, isabela futhi ihlanganise amafilimu ahlukahlukene ahlanganisiwe (ama-compound e-ammonia, ama-carbide, ama-oxide), futhi ihlanganise ngisho namafilimu e-DLC, amafilimu e-CN, njll. Ububi bayo ukuthi ngesikhathi sokufakwa, amaconsi amancane oketshezi ayachithwa ebusweni obuqondiwe, ahlangana nengqimba yefilimu ehlanganisiwe futhi andise ubulukhuni bengqimba yefilimu. Njengamanje, kuye kwafundwa izindlela eziningi ezisebenzayo zokunciphisa nokususa la maconsi amancane.
I-arc ion ye-vacuumcoUbuchwepheshe bokumboza busetshenziswe kabanzi ukumboza izembozo eziqinile kakhulu zamathuluzi nezikhunta. Izinhlelo zefilimu zifaka phakathi i-TiN, i-ZrN, i-HfN, i-TiAIN, i-TiC, i-TiNC, i-CrN, i-Al2O3, i-DLC, njll. Imikhiqizo yokumboza ifaka phakathi amathuluzi, izikhunta, njll. Ngokuphathelene nezembozo zokuhlobisa zegolide nombala, izinhlelo zefilimu zifaka phakathi i-TiN, i-ZrN, i-TiAIN, i-TiAINC, i-TC, i-TiNC, i-DLC, i-Ti-ON, i-TONC, i-ZrCN, i-Zr-ON, njll. Izinhlelo zefilimu yombala zifaka phakathi isibhamu esimnyama, esimnyama, esinsomi, esinsundu, esiluhlaza okwesibhakabhaka.
Ama-ion amaningi e-arccoI-ating inezinhlobo eziningi zezicelo kanye nokusebenza okunamandla, ikakhulukazi ekumbozeni izendlalelo zefilimu eqinile yokuhlobisa nengagugi ebusweni bezinto ezifana namathuluzi okusika, isikhunta, kanye namapuleti ensimbi engagqwali.
Isikhathi sokuthunyelwe: Agasti-17-2023