ʻIkepili o ka Vacuum Cathode Arc Ion Coating

ʻIona arc cathode vacuumcoua hoʻopōkole ʻia ʻo ating e like me ka vacuum arccoka hoʻohana ʻana. Inā ʻelua a ʻoi aku paha nā kumu hoʻoheheʻe arc vacuum (i kapa ʻia he mau kumu arc), ua kapa ʻia ʻo ia he multi arc ioncoʻā a i ʻole ka piʻo he nuicoka hoʻoheheʻe ʻana. He ʻenehana uhi ion vacuum ia e hoʻohana ana i ka hoʻokuʻu ʻana o ka arc vacuum no nā kumu mahu. ʻAʻole e like me ke arc electron wela o ka hoʻokuʻu ʻana o ka cathode hollow, ʻo kona ʻano arc ka hoʻokumu ʻia ʻana o nā kiko arc cathode ma ka ʻili o ka cathode anuanu.

Nā ʻano o ka vacuum cathode arc ioncoʻo nā mea e hana nei:

(1) ʻO ke kumu mahu he pahuhopu cathode paʻa, kahi e hoʻopuka pololei ai i ka plasma mai ke kumu pahuhopu cathode me ka ʻole o ka pono no kahi loko i hoʻoheheʻe ʻia. Hiki ke hoʻonohonoho ʻia ke kumu pahuhopu arc i kēlā me kēia ʻaoʻao a me nā kumu he nui e hōʻoia i ka uhi like ʻana.

(2) He maʻalahi ke ʻano o ka lako, me ka ʻole o ka pono no ke kinoea hana a i ʻole nā ​​ʻano ionization kōkua. ʻAʻole wale ke kumu pahuhopu arc he kumu hoʻoheheʻe no ka mea cathode, akā he kumu ion hoʻi; I ka wā o ka waiho ʻana o ka reactive, aia wale nō ke kinoea reactive, a hoʻomalu ʻia ka lewa me ka hoʻohana ʻana i kahi kaohi piha piha maʻalahi.

(3) Kiʻekiʻe ka nui o ka ionization, ma ke ʻano laulā e hiki ana i ka 60% ~ 80%, a kiʻekiʻe ka nui o ka deposition.

(4) Kiʻekiʻe ka ikehu ion i hoʻokuʻu ʻia, a maikaʻi ka ikaika hoʻopaʻa kiʻiʻoniʻoni/papa o ke kiʻiʻoniʻoni i waiho ʻia.

(5) Ke hoʻohana nei i kahi lako mana haʻahaʻa no ka hana palekana.

(6) Hiki iā ia ke waiho i nā kiʻiʻoniʻoni metala, nā kiʻiʻoniʻoni alloy, pane a synthesize i nā kiʻiʻoniʻoni hui like ʻole (nā hui ammonia, carbides, oxides), a hiki ke synthesize i nā kiʻiʻoniʻoni DLC, nā kiʻiʻoniʻoni CN, a pēlā aku. ʻO kona hemahema, ʻo ia ka wā o ka waiho ʻana, ua pīpī ʻia nā kulu liʻiliʻi o ka wai mai ka ʻili i manaʻo ʻia, kahi e hoʻopili ai i loko o ka papa kiʻiʻoniʻoni i uhi ʻia a hoʻonui i ka ʻoʻoleʻa o ka papa kiʻiʻoniʻoni. I kēia manawa, ua aʻo ʻia nā ʻano hana he nui e hōʻemi a hoʻopau i kēia mau kulu liʻiliʻi.

ʻIona ʻāʻī hakahakacoUa hoʻohana nui ʻia ka ʻenehana hana e uhi i nā uhi pale paʻa loa no nā mea hana a me nā ʻōmole. ʻO nā ʻōnaehana kiʻiʻoniʻoni e komo pū me TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, a pēlā aku. ʻO nā huahana uhi e komo pū me nā mea hana, nā ʻōmole, a pēlā aku. Ma ke ʻano o ke gula hoʻohālike a me nā uhi pale hoʻonaninani kala, ʻo nā ʻōnaehana kiʻiʻoniʻoni e komo pū me TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ON, TONC, ZrCN, Zr-ON, a pēlā aku. ʻO nā ʻōnaehana kiʻiʻoniʻoni kala e komo pū me ka pū ʻeleʻele, ʻeleʻele, poni, brown, uliuli ʻōmaʻomaʻo hina, a pēlā aku.

ʻIona ʻākoʻo he nuicoHe nui nā ʻano hana o ka hana ʻana a he ikaika ka pono, ʻoiai hoʻi i ka uhi ʻana i nā papa ʻiliʻili paʻakikī hoʻonaninani a me ke kūpaʻa i ke komo ʻana ma luna o nā mea e like me nā mea ʻokiʻoki, nā ʻōmole, a me nā papa kila kila.