Chidule cha Vacuum Cathode Arc Ion Coating

Chotsukira cha cathode arc ioncoKukonza kumafupikitsidwa ngati vacuum arccoNgati magwero awiri kapena angapo a vacuum arc evaporation (omwe amatchedwa magwero a arc) agwiritsidwa ntchito, amatchedwa multi arc ioncokuyika kapena ma arc ambiricoKutulutsa. Ndi ukadaulo wa vacuum ion wokutira womwe umagwiritsa ntchito kutulutsa kwa vacuum arc kuti utulutse madzi. Mosiyana ndi arc yotentha ya electron arc ya hollow cathode discharge, mawonekedwe ake a arc ndi mapangidwe a mawanga a cathode arc pamwamba pa cathode yozizira.

Makhalidwe a vacuum cathode arc ioncozinthu ndi izi:

(1) Gwero la evaporation ndi cathode target yolimba, yomwe imapanga plasma mwachindunji kuchokera ku cathode target source popanda kufunikira dziwe losungunuka. Arc target source ikhoza kukonzedwa mbali iliyonse ndi magwero angapo kuti zitsimikizire kuti kupaka kwake kuli kofanana.

(2) Kapangidwe ka zida ndi kosavuta, popanda kufunikira kwa mpweya wogwirira ntchito kapena njira zothandizira za ionization. Gwero la arc target si gwero lokha la evaporation la zinthu za cathode, komanso gwero la ion; Panthawi yogwira ntchito, mpweya wochitapo kanthu wokha umakhalapo, ndipo mlengalenga umayendetsedwa pogwiritsa ntchito njira yosavuta yowongolera kuthamanga kwa mpweya.

(3) Chiŵerengero cha ionization chimakhala chachikulu, nthawi zambiri chimafika 60% ~ 80%, ndipo chiŵerengero cha malo osungiramo zinthu chimakhala chachikulu.

(4) Mphamvu ya ma ion ochitika ndi yokwera, ndipo mphamvu yolumikizira filimu/substrate ya filimu yosungidwa ndi yabwino.

(5) Kugwiritsa ntchito mphamvu yamagetsi yochepa kuti igwire ntchito bwino.

(6) Imatha kuyika mafilimu achitsulo, mafilimu a alloy, kuchitapo kanthu ndikupanga mafilimu osiyanasiyana ophatikizika (ammonia compounds, carbides, oxides), komanso kupanga mafilimu a DLC, mafilimu a CN, ndi zina zotero. Vuto lake ndilakuti panthawi yoyika, madontho ang'onoang'ono amadzimadzi amathiridwa kuchokera pamwamba pa chinthucho, zomwe zimalowa mu filimu yokutidwa ndikuwonjezera kukhwima kwa filimuyo. Pakadali pano, njira zambiri zothandiza zaphunziridwa kuti zichepetse ndikuchotsa madontho ang'onoang'ono awa.

Ioni ya arc yopukutiracoUkadaulo wa ating wagwiritsidwa ntchito kwambiri popaka zophimba zoteteza zolimba kwambiri pazida ndi nkhungu. Makina amafilimu akuphatikizapo TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, ndi zina zotero. Zinthu zopaka zimaphatikizapo zida, nkhungu, ndi zina zotero. Ponena za zophimba zoteteza zokongoletsa zagolide ndi mitundu, makina amafilimu akuphatikizapo TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ON, TONC, ZrCN, Zr-ON, ndi zina zotero. Makina a mafilimu amitundu akuphatikizapo mfuti yakuda, yakuda, yofiirira, yofiirira, yabuluu Imvi yobiriwira, ndi zina zotero.

Ma ayoni ambiri a arccoAting ili ndi ntchito zambiri komanso yothandiza kwambiri, makamaka popaka utoto wolimba komanso wosawonongeka pamwamba pa zipangizo monga zida zodulira, nkhungu, ndi mbale zosapanga dzimbiri.