Iyoni y'icyuma gikoresha utwuma duto (vacuum cathode arc ion)coating ihinnye nka vacuum arccogukurura. Iyo hakoreshejwe amasoko abiri cyangwa menshi y'umwuka uvamo umwuka (azwi nka amasoko y'umwuka), yitwa multi arc ioncogutera cyangwa gupima imirasire myinshicogufunga. Ni ikoranabuhanga ryo gusiga irangi ry’iyoni rikoresha irangi ry’agati mu gusohora umwuka mu buryo bw’umwuka. Bitandukanye n’agati gashyushye ka electron gasohora umwuka mu buryo bw’ubushyuhe, imiterere yako ni ukurema utudomo twa cathode ku buso bwa cathode ikonje.
Ibiranga iy'icyuma gishyushya cathode arc ioncoibi bikurikira:
(1) Isoko y'amazi ni intego ikomeye ya cathode, ikora plasma mu buryo butaziguye ivuye mu isoko y'amazi ya cathode hatabayeho gukenera ikidendezi gishongeshejwe. Isoko y'amazi ishobora gushyirwa mu cyerekezo icyo ari cyo cyose n'amasoko menshi kugira ngo habeho gupfukanwa kumwe.
(2) Imiterere y'ibikoresho yoroshye, nta gaze ikora cyangwa uburyo bw'inyongera bwo kuyishyiramo. Isoko y'icyerekezo cy'umurambararo si isoko y'umwuka gusa ku bikoresho bya cathode, ahubwo ni n'isoko y'iyoni; Mu gihe cyo gushyiramo umwuka, umwuka uhinduka gusa uba uhari, kandi ikirere kigenzurwa hakoreshejwe uburyo bworoshye bwo kugenzura umuvuduko wuzuye.
(3) Igipimo cya ionization kiri hejuru, muri rusange kigera kuri 60% ~ 80%, kandi igipimo cyo gushyiramo kiri hejuru.
(4) Ingufu za ion ziterwa n'impanuka ziri hejuru, kandi imbaraga zo guhuza filime/substrate za filime yashyizwemo ni nziza.
(5) Gukoresha amashanyarazi afite voltage nkeya kugira ngo ikore neza.
(6) Ishobora gushyiramo ibyuma, ibyuma bya alloy, gukora reactivite no gukora ibyuma bitandukanye (compounds za amoniya, carbides, oxydes), ndetse no gukora ibyuma bya DLC, ibyuma bya CN, nibindi. Ingorane zayo ni uko mu gihe cyo gushyiramo, udutonyanga duto tw'amazi dusohoka mu gice cy'ingenzi, tukivanga mu gice cy'icyuma gitwikiriye kandi twongera ubukana bw'igice cy'icyuma. Muri iki gihe, hari uburyo bwinshi bwiza bwakozwe kugira ngo bugabanuke kandi bukureho utu duto duto.
Iyoni y'icyuma gikoresha umwukacoIkoranabuhanga ryo gusiga rikoreshwa cyane mu gusiga irangi rikomeye cyane ku bikoresho n'ibibumbano. Sisitemu za firime zirimo TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, nibindi. Ibikoresho byo gusiga birimo ibikoresho, ibibumbano, nibindi. Ku bijyanye n'irangi ryiganjemo zahabu n'amabara, sisitemu za firime zirimo TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ON, TONC, ZrCN, Zr-ON, nibindi. Sisitemu za firime z'amabara zirimo umukara w'imbunda, umukara, umuhengeri, umukara, ubururu.
Iyoni nyinshi z'umurambararocoAting ifite uburyo bwinshi bwo kuyikoresha kandi ifite akamaro gakomeye, cyane cyane mu gusiga ibyuma bikomeye byo mu bwoko bwa firime yo mu bwoko bwa "stairs" kandi idashaje ku buso bw'ibikoresho nk'ibikoresho byo gukata, imashini zibumba, n'amasahani y'icyuma kitagira umugese.
Igihe cyo kohereza: Kanama-17-2023