I-arc ion ye-cathode ye-vacuumcoi-ating ifinyeziwe njenge-vacuum arccoUkuba kusetyenziswa imithombo emibini okanye ngaphezulu ye-vacuum arc evaporation (ebizwa ngokuba yimithombo ye-arc), ibizwa ngokuba yi-multi arc ioncoukujikeleza okanye ii-arc ezininzicoukucoca. Yiteknoloji yokugquma i-ion ye-vacuum esebenzisa i-vacuum arc discharge kwimithombo yokufuma. Ngokungafaniyo ne-electron arc eshushu ye-hollow cathode discharge, imo yayo ye-arc kukwakheka kwamabala e-cathode arc kumphezulu we-cold cathode.
Iimpawu ze-arc ion ye-vacuum cathodecoizinto ezifunekayo zezi:
(1) Umthombo wokufuma yithagethi eqinileyo ye-cathode, evelisa ngokuthe ngqo i-plasma evela kumthombo wethagethi ye-cathode ngaphandle kwesidingo sedama elinyibilikisiweyo. Umthombo wethagethi ye-arc unokucwangciswa kulo naliphi na icala kunye nemithombo emininzi ukuqinisekisa ukugqunywa okufanayo.
(2) Ulwakhiwo lwezixhobo lulula, ngaphandle kwemfuneko yegesi esebenzayo okanye iindlela ze-ionization ezincedisayo. Umthombo we-arc target awungomthombo wokufuma wezinto ze-cathode kuphela, kodwa ukwangumthombo we-ion; Ngexesha lokufakwa kwe-reactive, kukho igesi ephendulayo kuphela, kwaye umoya ulawulwa kusetyenziswa ulawulo olupheleleyo loxinzelelo.
(3) Izinga le-ionization liphezulu, ngokubanzi lifikelela kwi-60% ~ 80%, kwaye izinga lokufakwa kwe-deposit liphezulu.
(4) Amandla e-ion yesiganeko aphezulu, kwaye amandla okubopha ifilimu/i-substrate yefilimu egciniweyo alungile.
(5) Ukusebenzisa umbane osebenzisa umbane ophantsi ukuze usebenze ngokukhuselekileyo.
(6) Ingabeka iifilimu zesinyithi, iifilimu ze-alloy, iphendule kwaye idibanise iifilimu ezahlukeneyo ze-compound (ii-ammonia compounds, ii-carbides, ii-oxides), kwaye ide idibanise iifilimu ze-DLC, iifilimu ze-CN, njl. Ingxaki yayo kukuba ngexesha lokufaka, amaconsi amancinci olwelo ayatshizwa kumphezulu ekujoliswe kuwo, ajiya kumaleko wefilimu egqunyiweyo kwaye anyuse uburhabaxa bomaleko wefilimu. Okwangoku, iindlela ezininzi ezisebenzayo ziye zafundwa ukunciphisa nokususa la maconsi amancinci.
I-arc ion ye-vacuumcoItekhnoloji yokulungisa isetyenziswa kakhulu ukugquma iingubo ezikhuselayo eziqinileyo zezixhobo kunye neembombo. Iinkqubo zefilimu ziquka iTiN, iZrN, iHfN, iTiAIN, iTiC, iTiNC, iCrN, iAl2O3, iDLC, njl. Iimveliso zokugquma ziquka izixhobo, iimbombo, njl. Ngokuphathelele iingubo zokukhusela ezinemibala yegolide kunye nombala, iinkqubo zefilimu ziquka iTiN, iZrN, iTiAIN, iTiAINC, iTC, iTiNC, iDLC, iTi-ON, iTONC, iZrCN, iZr-ON, njl. Iinkqubo zefilimu ezinemibala ziquka umpu omnyama, omnyama, omfusa, omdaka, oluhlaza okwesibhakabhaka.
Ii-arc ion ezininzicoI-ating ineendlela ezahlukeneyo zokusetyenziswa kunye nokusebenza okunamandla, ingakumbi ekugqumeni iileya zefilimu eqinileyo yokuhombisa kunye nokumelana nokuguguleka kumphezulu wezinto ezifana nezixhobo zokusika, ii-mold, kunye neepleyiti zentsimbi engagqwaliyo.
Ixesha lokuthumela: Agasti-17-2023