Ioni ye arc ye vacuum cathodecoating yakapfupikiswa se "vacuum arc"coKana matsime maviri kana anopfuura emvura inobuda mumhepo (anonzi matsime emvura inobuda mumhepo) akashandiswa, anonzi maion akawanda emvura inobuda mumhepo.cokugadzira kana kuti multi arccoKuvhara. Iyi inyanzvi yekuvhara maion evacuum inoshandisa kuburitsa arc ye vacuum kuti iwane manyuko emvura. Kusiyana nehot electron arc ye hollow cathode discharge, chimiro chayo che arc ndechekuumbwa kwemapoinzi e cathode arc pamusoro pe cathode inotonhora.
Hunhu hwe vacuum cathode arc ioncozvinhu zvinotevera:
(1) Sosi yemvura inobuda mumhepo inzvimbo yakasimba ye cathode, iyo inogadzira plasma zvakananga kubva ku sosi ye cathode pasina chikonzero chedziva rakanyungudutswa. Sosi ye arc inogona kurongwa chero kupi uye masosi akawanda kuti ive nechokwadi chekuti yakaenzana.
(2) Chimiro chemidziyo chiri nyore, pasina gasi rinoshanda kana nzira dzekubatsira dze ionization. Nzvimbo inotarirwa ne arc haisi chete sosi ye evaporation yezvinhu zve cathode, asiwo sosi ye ion; Munguva ye reactive deposition, gasi rinoita reactive chete ndiro rinovapo, uye mhepo inodzorwa uchishandisa nyore nyore full pressure control.
(3) Mwero weionization wakakwira, kazhinji unosvika 60% ~ 80%, uye mwero wekuisa wakakwira.
(4) Simba reioni yechiitiko rakakwira, uye simba rekubatanidza firimu/substrate refirimu rakaiswa rakanaka.
(5) Kushandisa simba remagetsi rakaderera kuti ishande zvakachengeteka.
(6) Inogona kuisa mafirimu esimbi, mafirimu e alloy, kuita react uye kugadzira mafirimu akasiyana-siyana e compound (ammonia compounds, carbides, oxides), uye kutogadzira mafirimu eDLC, mafirimu eCN, nezvimwewo. Dambudziko rayo nderekuti panguva yekuiswa, madonhwe madiki emvura anodururwa kubva pamusoro pechinangwa, ayo anoungana muchikamu chefirimu chakaputirwa uye anowedzera kuomarara kwechikamu chefirimu. Parizvino, nzira dzakawanda dzinoshanda dzakadzidzwa kuderedza nekubvisa madonhwe aya madiki.
Ioni yeakisi yemuchinacoTekinoroji yekudzivirira yave ichishandiswa zvakanyanya kuputira machira ekudzivirira akaomarara ezvishandiso nemafuru. Masisitimu emafirimu anosanganisira TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, nezvimwewo. Zvigadzirwa zvekuputira zvinosanganisira maturusi, mafuru, nezvimwewo. Panyaya yekushongedza machira ekudzivirira egoridhe uye mavara, masisitimu emafirimu anosanganisira TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ON, TONC, ZrCN, Zr-ON, nezvimwewo. Masisitimu emafirimu emavara anosanganisira pfuti nhema, nhema, pepuru, brown, bhuruu Girini grey, nezvimwewo.
Maion akawanda e arccoAting ine mashandisirwo akasiyana-siyana uye inoshanda zvakanyanya, kunyanya pakuputira zvidimbu zvemafirimu akaomarara zvinoshongedza uye zvinoramba zvichipera pamusoro pezvinhu zvakaita sezvishandiso zvekucheka, mapundu, uye mapurati esimbi asina ngura.
Nguva yekutumira: Nyamavhuvhu-17-2023