Nkọwa nke mkpuchi Vacuum Cathode Arc Ion

Aịọn arc katọde vacuumcoA na-akpọ ating acrom dị ka vacuum arccoỌ bụrụ na ejiri isi mmalite ikuku vacuum abụọ ma ọ bụ karịa (nke a na-akpọ isi mmalite arc), a na-akpọ ya multi arc ioncoịgba ọsọ ma ọ bụ multiarccoỌ bụ teknụzụ mkpuchi ion vacuum nke na-eji mwepụ vacuum arc maka isi mmalite ikuku. N'adịghị ka arc electron na-ekpo ọkụ nke mwepụ cathode oghere, ụdị arc ya bụ ịmepụta ntụpọ cathode arc n'elu cathode oyi.

Njirimara nke ion arc cathode vacuumcoihe ndị a bụ:

(1) Isi iyi nke ikuku na-ekupụ mmiri bụ ihe siri ike a na-akpọ kathode target, nke na-ewepụta plasma ozugbo site na isi iyi kathode target na-enweghị mkpa maka ọdọ mmiri gbazere agbaze. Enwere ike ịhazi isi iyi arc target n'akụkụ ọ bụla na ọtụtụ isi mmalite iji hụ na mkpuchi ahụ dị otu.

(2) Nhazi akụrụngwa ahụ dị mfe, na-enweghị mkpa maka gas na-arụ ọrụ ma ọ bụ ụzọ ionization enyemaka. Isi iyi ebumnuche arc abụghị naanị isi iyi evaporation maka ihe cathode, kamakwa isi iyi ion; N'oge nkwụnyeghachi mmeghachi omume, naanị gas na-emeghachi omume dị, a na-ejikwa ikuku site na iji njikwa nrụgide zuru oke dị mfe.

(3) Ọnụego ionization dị elu, na-erukarị 60% ~ 80%, ọnụego ntinye dịkwa elu.

(4) Ike ion nke ihe merenụ dị elu, ike njikọ fim/substrate nke ihe nkiri ahụ e tinyere dị mma.

(5) Iji obere ọkụ eletrik eme ihe maka ọrụ dị mma.

(6) Ọ nwere ike itinye ihe nkiri ígwè, ihe nkiri alloy, meghachi omume ma mepụta ọtụtụ ihe nkiri compound (ammonia compounds, carbide, oxides), ma ọ bụ mepụta ihe nkiri DLC, ihe nkiri CN, wdg. Ihe na-adịghị mma ya bụ na n'oge a na-etinye ihe, a na-awụsa obere mmiri mmiri site na elu ebumnuche, nke na-agbakọta na oyi akwa ihe nkiri a kpuchiri ekpuchi ma na-eme ka ọ sie ike nke oyi akwa ihe nkiri ahụ. Ugbu a, amụọla ọtụtụ ụzọ dị irè iji belata ma wepụ obere mmiri ndị a.

Aịọn arc vacuumcoA na-eji teknụzụ ating eme ihe nke ukwuu iji kpuchie mkpuchi nchebe siri ike maka ngwaọrụ na ebu. Sistemụ ihe nkiri gụnyere TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, wdg. Ngwaahịa mkpuchi gụnyere ngwaọrụ, ebu, wdg. N'ihe gbasara mkpuchi nchebe ọla edo na agba, sistemụ ihe nkiri gụnyere TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ON, TONC, ZrCN, Zr-ON, wdg. Sistemụ ihe nkiri agba gụnyere egbe ojii, oji, odo odo, aja aja, acha anụnụ anụnụ isi awọ akwụkwọ ndụ akwụkwọ ndụ, wdg.

Ion arc dị iche ichecoAting nwere ọtụtụ ojiji na arụmọrụ siri ike, ọkachasị n'ikpuchi ihe mkpuchi siri ike nke ịchọ mma na nke na-eguzogide iyi n'elu ihe ndị dị ka ngwaọrụ ịkpụ ihe, ebu, na efere ígwè anaghị agba nchara.