Vacuum cathode arc ioncoi-ating ifushaniswa njenge-vacuum arccoukudla. Uma kusetshenziswa imithombo emibili ye-vacuum arc evaporation (okubhekiselwa kuyo njengemithombo ye-arc) ibizwa ngokuthi i-multi arc ion.coukudla noma i-multi arccoukudla. Ubuchwephesha bokumboza i-vacuum ion obusebenzisa ukukhishwa kwe-vacuum arc emithonjeni yokuhwamuka. Ngokungafani ne-arc ye-electron eshisayo yokukhishwa kwe-cathode engenalutho, ifomu layo le-arc ukwakheka kwamabala e-cathode arc ebusweni be-cathode ebandayo.
Izici ze-vacuum cathode arc ioncoukulinganisa yilezi:
(1) Umthombo wokuhwamuka uyithagethi eqinile ye-cathode, ekhiqiza ngokuqondile i-plasma emthonjeni oqondiwe we-cathode ngaphandle kwesidingo sechibi elincibilikisiwe. Umthombo ohlosiwe we-arc ungahlelwa kunoma iyiphi indlela kanye nemithombo eminingi ukuze kuqinisekiswe ukunamathela okufanayo.
(2) Isakhiwo semishini silula, ngaphandle kwesidingo sokusebenza kwegesi noma izindlela ezisizayo ze-ionization. Umthombo ohlosiwe we-arc awuwona nje umthombo wokuhwamuka kwezinto ze-cathode, kodwa futhi ungumthombo we-ion; Ngesikhathi sokufakwa kabusha, igesi esebenzayo kuphela ekhona, futhi umkhathi ulawulwa kusetshenziswa isilawuli sokucindezela esigcwele esilula.
(3) Izinga le-ionization liphezulu, ngokuvamile lifinyelela ku-60% ~ 80%, futhi izinga lokubeka liphezulu.
(4) Amandla e-ion yesigameko aphakeme, futhi amandla okubopha ifilimu/i-substrate yefilimu efakiwe mahle.
(5) Ukusebenzisa amandla kagesi aphansi ukuze kusebenze ngokuphephile.
(6) Ingafaka amafilimu ensimbi, amafilimu engxubevange, isabele futhi ihlanganise amafilimu ayinhlanganisela ahlukahlukene (inhlanganisela ye-ammonia, ama-carbides, ama-oxide), futhi ihlanganise ngisho namafilimu e-DLC, amafilimu e-CN, njll. Ububi bayo ukuthi ngesikhathi sokufakwa, amaconsi amancane oketshezi afafazwa esuka endaweni okuhlosiwe, ajiya ungqimba lwefilimu oluqinile. Njengamanje, izindlela eziningi ezisebenzayo sezihloliwe ukunciphisa nokuqeda la maconsi amancane.
Vacuum i-arc ioncoubuchwepheshe bokulinganisa sebusetshenziswe kabanzi ukumboza izembatho zokuvikela eziqinile zamathuluzi nezibunji. Amasistimu wefilimu ahlanganisa i-TiN, i-ZrN, i-HfN, i-TiAIN, i-TiC, i-TiNC, i-CrN, i-Al2O3, i-DLC, njll. Imikhiqizo yokumboza ihlanganisa amathuluzi, isikhunta, njll. Mayelana nokulingisa igolide nombala wezingubo zokuvikela zokuhlobisa, amasistimu amafilimu ahlanganisa i-TiN, i-ZrN, i-TiAIN, i-TiAINC, i-TC, i-TiNC, i-DLC, i-Ti-ONC yefilimu, i-TONC njll. black, black, purple, brown, blue Green grey, njll.
Ama-arc ion amaningicoI-ating inohlelo olubanzi lwezinhlelo zokusebenza nokusebenza okuqinile, ikakhulukazi ekuhlanganiseni izendlalelo zefilimu eqinile ezihlobisa nezingagugi endaweni yezinto ezinjengamathuluzi okusika, isikhunta, namapuleti ensimbi engagqwali.
Isikhathi sokuthumela: Aug-17-2023