Yintoni ukuxhathisa umthombo womoya wokwaleka?

Ukwaleka komthombo wobushushu yindlela yokwaleka isiseko sevacuum. "Umphunga" ubhekiselele kwindlela yokulungiselela ifilimu ebhityileyo apho izinto zokugquma kwigumbi lokufunxa zifudunyezwa kwaye zibe ngumphunga, ukuze iiathom eziphathekayo okanye iimolekyuli zibe ngumphunga kwaye ziphume kumphezulu, zenze isenzeko sokuqukuqela komphunga, isehlo kumphezulu we-substrate okanye i-substrate, kwaye ekugqibeleni ijikwe ukuze yenze ifilimu eqinileyo.

Indlela ebizwa ngokuba yi-resistance evaporation source coating kukusebenzisa i-tantalum, i-molybdenum, i-tungsten kunye nezinye iindawo eziphezulu zokunyibilika kwesinyithi ukwenza imilo efanelekileyo yomthombo wokunyuka komphunga, elayishwe ngezinto ezinokuthi zibe ngumphunga, vumela umoya uhambe, ukufudumala ngokuthe ngqo kwaye ukhuphe izinto ezikhutshiweyo, okanye ubeke izinto ezinokuthi zibe ngumphunga kwi-alumina kunye ne-evaporation enomphunga we-beryllium . Le yindlela yokumelana nokufudumeza umphunga.

Iumatshini wokugquma umphunga wokugqumaifudunyezwe kwaye ikhutshwe yi-heater yokumelana ineenzuzo zesakhiwo esilula, ixabiso eliphantsi kunye nokusetyenziswa okuthembekileyo. Ingasetyenziselwa ukugquma kwezixhobo ezinendawo yokunyibilika ephantsi, ngakumbi kwimveliso yobuninzi kunye neemfuno eziphantsi zomgangatho wokugquma. Ukuza kuthi ga ngoku, kusekho inani elikhulu leenkqubo zokugquma zokufudumeza okuxhathisayo kunye nokunyuka komphunga kusetyenziswe ukuveliswa kwezibuko ezilumkileyo.

Ukungalungi ukuxhathisa evaporation umthombo evaporation yokwambathisa indlela yokwaleka kukuba ubushushu eliphezulu enokufikelelwa ngokufudumeza kulinganiselwe, kwaye ubomi benkonzo heater nayo bufutshane. Kwiminyaka yakutshanje, ukuze kuphuculwe ubomi bomthombo wokuchasana nokunyuka komphunga, umzi-mveliso wezixhobo uye wamkela imathiriyeli ye-ceramic eqhutywayo eyenziwe yi-boron nitride nobomi obude njengomthombo wokuphuphuma komphunga. Ngokwengxelo yaseJapan patent, inokusebenzisa izinto ezenziwe nge-20% ~ 30% ye-boron nitride kunye nezixhobo ezinqandayo ezinokudityaniswa nayo ukwenza umthombo wokuphuphuma komphunga (i-crucible), kwaye igqume umphezulu wayo nge-zirconium equkethe i-62% ~ 82%, kwaye ezinye zirconium-silicon alloy materials.