Vacuum cathode arc ioncoukuntywila kushunqulelwe njenge-vacuum arccoukutya. Ukuba imithombo emibini okanye ngaphezulu yokufunxa i-arc evaporation (ekubhekiselwa kuyo njengemithombo ye-arc) iyasetyenziswa, ibizwa ngokuba yi-multi arc ion.coukubetha okanye i-arc ezininzicoukutya. Bubuchwephesha bokugquma i-ion esebenzisa i-vacuum arc discharge kwimithombo yokuguquka kwamanzi. Ngokungafaniyo ne-arc ye-electron eshushu yokukhutshwa kwe-cathode evulekileyo, ifom yayo ye-arc kukubunjwa kwamabala e-cathode arc ebusweni be-cathode ebandayo.
Iimpawu ze-vacuum cathode arc ioncoUkutya oku:
(1) Umthombo wokuphuphuma komphunga yithagethi eqinileyo yecathode, eyenza ngokuthe ngqo iplasma ukusuka kumthombo ekujoliswe kuwo wecathode ngaphandle kwesidingo sedama elinyibilikisiweyo. Umthombo ojoliswe kuwo we-arc unokucwangciswa kuyo nayiphi na indlela kunye nemithombo emininzi yokuqinisekisa ukugquma okufanayo.
(2) Isakhiwo sesixhobo silula, ngaphandle kwesidingo sokusebenza kwegesi okanye iindlela ezincedisayo ze-ionization. Umthombo ekujoliswe kuwo we-arc awukho nje umthombo we-evaporation wezinto ze-cathode, kodwa kunye nomthombo we-ion; Ngexesha lokubeka i-reactive, kuphela igesi esebenzayo ekhoyo, kwaye umoya ulawulwa kusetyenziswa ulawulo olulula olupheleleyo.
(3) Izinga le-ionization liphezulu, ngokubanzi lifikelela kwi-60% ~ 80%, kwaye izinga lokubeka liphezulu.
(4) Amandla e-ion yesiganeko aphezulu, kwaye ifilimu / i-substrate bonding force yefilimu egciniweyo ilungile.
(5) Ukusebenzisa umbane ophantsi kwamandla ombane ukuze usebenze ngokukhuselekileyo.
(6) Iyakwazi ukufaka iifilimu zetsimbi, iifilimu ze-alloy, iphendule kwaye idibanise iifilimu ezahlukeneyo ze-compound (i-ammonia compounds, i-carbides, i-oxides), kunye nokudibanisa iifilimu ze-DLC, iifilimu ze-CN, njl. Okwangoku, iindlela ezininzi ezisebenzayo ziye zafundiswa ukunciphisa kunye nokuphelisa la maconsi amancinci.
Vacuum arc ioncoitekhnoloji yokulinganisa isetyenzisiwe ngokubanzi ukugquma iingubo ezikhuselayo eziphezulu zezixhobo kunye nokubumba. Iinkqubo zefilimu ziquka i-TiN, i-ZrN, i-HfN, i-TiAIN, i-TiC, i-TiNC, i-CrN, i-Al2O3, i-DLC, njl. Iimveliso ze-Coating zibandakanya izixhobo, i-molds, njl njl. Ngokuphathelele ukuxelisa igolide kunye nombala okhuselayo okhuselayo, iinkqubo zefilimu ziquka i-TiN, i-ZrN, i-TiAIN, i-TiAINC, i-TC, i-TiNC, i-DLC, i-ZrONC yefilimu, i-TONC, njl. emnyama, emnyama, emfusa, emdaka, eluhlaza okwesibhakabhaka eluhlaza grey, njl.
Ii-arc ion ezininzicoI-ating inoluhlu olubanzi lwezicelo kunye nokusebenza okuqinileyo, ngakumbi ekugqumeni ukuhombisa kunye nokumelana neengqimba zefilimu eziqinileyo kumphezulu wezinto ezifana nezixhobo zokusika, iimbumba, kunye neepleyiti zentsimbi.
Ixesha lokuposa: Aug-17-2023