Habka daahan dahaadhka ah, xeryahooda waxaa loo isticmaali karaa bartilmaameedyo loogu talagalay diyaarinta filimada kiimikada la sameeyay. Si kastaba ha noqotee, halabuurka filimka ee la soo saaray ka dib markii la jeexjeexay walxaha bartilmaameedka ah ayaa inta badan si weyn uga leexanaya asalka asalka ah ee walxaha bartilmaameedka ah, sidaas darteed ma buuxinayo shuruudaha naqshadda asalka ah. Haddii bartilmaameedka birta saafiga ah la isticmaalo, gaaska firfircoon ee loo baahan yahay (tusaale, ogsijiin marka la diyaarinayo filimada oksaydhka) ayaa si miyir leh loogu dhex daraa gaaska shaqada (daaya), si ay kiimiko ahaan ula falgasho walxaha bartilmaameedka ah si ay u soo saarto filim khafiif ah oo la xakameyn karo marka loo eego halabuurka iyo sifooyinka. Habkan waxaa inta badan loo yaqaan "faal-celinta falcelinta".
Sida hore loo soo sheegay, RF sputtering waxaa loo isticmaali karaa in lagu kaydiyo filimada dielectric iyo filimada kala duwan ee isku dhafan. Si kastaba ha noqotee, si loo diyaariyo filim "saafi ah", waxaa lagama maarmaan ah in la helo bartilmaameed "saafi ah", oksaydh nadiif ah oo sarreeya, nitride, carbide, ama budo kale oo isku dhafan. Ka-hortagga budada kuwan bartilmaameedka qaab gaar ah waxay u baahan tahay in lagu daro waxyaabaha lagu daro ee lagama maarmaanka u ah samaynta ama shaandhaynta, taas oo keeneysa hoos u dhac weyn oo ku yimaada nadiifinta bartilmaameedka iyo filimka ka soo baxa. Si kastaba ha ahaatee, xajinta falcelinta, si kastaba ha ahaatee, tan iyo biraha nadiifka ah iyo gaasaska saafiga ah ayaa loo isticmaali karaa, xaalado ku habboon ayaa la bixiyaa diyaarinta filimada nadiifka ah. Xoojinta falcelinta firfircooni waxay heshay dareenka sii kordhaya sannadihii la soo dhaafay waxayna noqotay hab weyn oo lagu soo daadiyo aflaanta khafiifka ah ee xeryahooda shaqo ee kala duwan. Waxaa si weyn loo isticmaalaa in wax soo saarka ee IV, I-iyo IV- xeryahooda, semiconductors refractory, iyo noocyo kala duwan oo oxides, sida isticmaalka polycrystalline Si iyo CH./Ar isku dar ah gaas si ay u toogtaan roobabka ee filimada khafiifka ah SiC, Ti bartilmaameed iyo N / Ar si ay u diyaariyaan TiN filimada adag, Ta iyo O / Ar si ay u diyaariyaan TaO; filimada khafiifka ah dielectric, Fe iyo O, / Ar si ay u diyaariyaan -FezO; -Fezo. filimada duubista, filimada piezoelectric AIN A1 iyo N / Ar, A1-CO filimada nuugista xulashada leh AI iyo CO / Ar, iyo YBaCuO-filimaadka superconducting Y-Ba-Cu iyo O / Ar, iyo kuwo kale.
–Maqaalkan waxa soo saaraysoo saaraha mashiinka daahan vacuumGuangdong Zhenhua
Waqtiga boostada: Jan-18-2024