Vacuum cathode arc ioncocunista waxa loo soo gaabiyaa vacuum arccocunid. Haddii laba ama in ka badan ilo uumi-baxa vacuum ah (oo loo yaqaan ilaha arc) la isticmaalo, waxaa loo yaqaan 'multi arc ion'.codharbaaxo ama arc badancocunid. Waa tignoolajiyada dahaarka vacuum ion taasoo u adeegsata dheecaanka vacuum arc ilaha uumiga. Si ka duwan sida elektarooniga kulul ee dheecaanka cathode godan, qaabkeeda arc waa samaynta dhibcaha cathode arc ee dusha sare ee cathode qabow.
Astaamaha vacuum cathode arc ioncowax qabadku waa:
(1) Ilaha uumiga waa bartilmaameed adag oo cathode ah, kaas oo si toos ah uga soo saara balaasmaha isha bartilmaameedka cathode iyada oo aan loo baahnayn barkad dhalaalaysa. Isha bartilmaameedka arc waxaa loo habeyn karaa jiho kasta iyo ilo badan si loo hubiyo dahaarka isku midka ah.
(2) Qaab dhismeedka qalabku waa mid fudud, iyada oo aan loo baahnayn gaas shaqeynaya ama hababka ionization kaaliyaha. Ilaha bartilmaameedka arc ma aha oo kaliya isha uumiga ee walxaha cathode, laakiin sidoo kale isha ion; Inta lagu jiro meel dhigista falcelinta, kaliya gaas fal-celin ah ayaa jira, jawiga waxaa lagu xakameynayaa iyada oo la adeegsanayo xakamaynta cadaadiska buuxa ee fudud.
(3) Heerka ionization-ku waa sarreeyaa, guud ahaan wuxuu gaaraa 60% ~ 80%, iyo heerka dhigaalka ayaa sarreeya.
(4) Tamarta ion dhacdada waa mid sareysa, iyo xoogga isku xirka filimka / substrate-ka ee filimka la dhigay waa mid wanaagsan.
(5) Isticmaalka koronto yar oo danab yar si loo hawlgalo badbaado leh.
(6) Waxay ku shubi kartaa filimada birta ah, filimada daawaha ah, falcelinta iyo synthesize filimada kala duwan ( xeryahooda ammonia, carbides, oxides), iyo xataa synthesize filimada DLC, filimada CN, iwm khasaaraha ay tahay in inta lagu guda jiro dhigaalka, dhibco yar yar oo dareere ah ayaa ka soo firdhiyey dusha bartilmaameedka, kuwaas oo isku urursada lakabka filimka dahaarka ah ee lakabka filimka iyo kordhinta lakabka filimka. Hadda, habab badan oo wax ku ool ah ayaa la darsay si loo yareeyo loogana takhaluso dhibcahan yar yar.
Vacuum arc ioncoTignoolajiyada cunista ayaa si weyn loo isticmaalay si loogu dahaadho dahaarka ka hortagga aadka u adag ee agabka iyo caaryada. Nidaamyada filimka waxaa ka mid ah TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, iwm. Alaabta daboolka ah waxaa ka mid ah qalabka, caaryada, iwm madow, guduud, bunni, buluug cawlan cagaaran, iwm.
Multi arc ioncoAting waxay leedahay codsiyo badan oo kala duwan iyo wax ku ool xoog leh, gaar ahaan dahaarka qurxinta iyo xirashada lakabyada filimada adag ee dusha sare ee alaabta sida qalabka wax lagu gooyo, caaryada, iyo taarikada birta ah.
Waqtiga boostada: Agoosto-17-2023