Resistance evaporation source coating ndiyo yakakosha vacuum evaporation coating nzira. "Evaporation" inoreva nzira yakatetepa yekugadzirira iyo iyo yekuputira mukamuri yevacuum inodziiswa uye ichibuda, kuitira kuti maatomu enyama kana mamorekuru anonyungudika uye apukunyuke kubva pamusoro, achigadzira chiitiko chekuyerera kwemhute, chiitiko pamusoro peiyo substrate kana substrate, uye pakupedzisira yakapfupikiswa kuita firimu rakasimba.
Iyo inonzi inopikisa evaporation source coating method ndeye kushandisa tantalum, molybdenum, tungsten uye mamwe masimbi akakwirira kuti aite chimiro chakakodzera chekuputira chitubu, icho chinotakurwa nezvinhu zvinoputika, rega mhepo iende kuburikidza, kupisa zvakananga uye kuputika zvinhu zvinoputika, kana kuisa zvinhu kuti zvive evaporated mualumina, beryllium evaporation uye mamwe evaporation oxide. Iyi ndiyo nzira yekudzivirira kupisa evaporation.
Thevacuum evaporation coating machinekupisa uye evaporated nekupikisa heater ine zvakanakira chimiro chakareruka, mutengo wakaderera uye kushandiswa kwakavimbika. Inogona kushandiswa pakuputira evaporation yemidziyo ine yakaderera kunyungudika nzvimbo, kunyanya kugadzirwa kwemazhinji ine zvakaderera zvinodiwa zvemhando yekuputira. Kusvika pari zvino, kuchine huwandu hukuru hwemaitiro ekuputira ekudzivirira kudziyisa uye evaporation yakaiswa mukugadzirwa kwealuminum girazi.
Izvo zvisingabatsiri zvekupikisa evaporation source evaporation coating nzira ndeyokuti tembiricha yepamusoro inogona kusvikwa nekupisa ishoma, uye hupenyu hwebasa rehita zvakare hupfupi. Mumakore achangopfuura, kuitira kuvandudza hupenyu hweanopokana evaporation sosi, fekitori yemidziyo yakatora iyo conductive ceramic material yakagadzirwa ne boron nitride nehupenyu hurefu sehupo hwekubuda. Sekureva kwemushumo wepatent yeJapan, inogona kushandisa zvinhu zvinoumbwa ne20% ~ 30% boron nitride uye zvinhu zvinoramba zvichisanganiswa nazvo kuti iite evaporation sosi (crucible), uye kupfekedza pamusoro payo nejira re zirconium ine 62% ~ 82%, uye zvimwe zvese zirconium-silicon alloy zvinhu.
Nguva yekutumira: Kubvumbi-22-2023