Mukuita sputtering coating process, makomisheni anogona kushandiswa sezvinangwa zvekugadzirira mafirimu akagadzirwa nemakemikari. Zvisinei, kuumbwa kwefirimu rinogadzirwa mushure mekuputika kwechinhu chakanangwa chinowanzosiyana zvikuru kubva pakuumbwa kwepakutanga kwezvinhu zvakatarirwa, uye naizvozvo hazvizadzisi zvinodiwa zvekugadzirwa kwepakutanga. Kana chinangwa chesimbi yakachena chikashandiswa, gasi rinodiwa rinoshanda (somuenzaniso, okisijeni paunenge uchigadzira oxide mafirimu) inosanganiswa nehana mukushanda (kubuda) gasi, kuitira kuti inopindirana nemakemikari nechinhu chinotarirwa kuti ibudise firimu rakatetepa rinogona kudzorwa maererano nekuumbwa kwayo uye maitiro. Iyi nzira inowanzonzi "reaction sputtering".
Sezvambotaurwa, RF sputtering inogona kushandiswa kuisa dielectric mafirimu uye akasiyana emusanganiswa mafirimu. Zvisinei, kuitira kuti ugadzirire firimu "yakachena", inofanirwa kuva ne "yakachena" chinangwa, high-purity oxide, nitride, carbide, kana imwe poda yakasanganiswa. Kugadzira mapoda aya kuita chinangwa chechimwe chimiro kunoda kuwedzerwa kwezvinowedzera zvinodiwa pakuumba kana kunyunguduka, izvo zvinoguma nekuderera kukuru mukuchena kwechinangwa uye firimu rinobuda. Mune reactive sputtering, zvisinei, sezvo yakakwirira-kuchena simbi uye yakakwirira-kuchena magasi anogona kushandiswa, zviri nyore mamiriro anopiwa pakugadzirira kwepamusoro-kuchena mafirimu. Reactive sputtering yakawana kutariswa kwakawedzera mumakore achangopfuura uye yave nzira huru yekunayisa mafirimu matete eakasiyana anoshanda makomisheni. Yakashandiswa zvakanyanya mukugadzira IV, I- uye IV-V komputa, refractory semiconductors, uye akasiyana oxides, sekushandisa polycrystalline Si uye CH./Ar musanganiswa wemagasi kupfura kunaya kweSiC mafirimu matete, Ti target uye N/Ar kugadzirira TiN hard films, Ta uye O/Ar kugadzirira TaO; dielectric matete mafirimu, Fe uye O, / Ar kugadzirira -FezO; -FezO. kurekodha mafirimu, AIN piezoelectric mafirimu ane A1 uye N/Ar, A1-CO selective absorption mafirimu ane AI neCO/Ar, uye YBaCuO-superconducting mafirimu ane Y-Ba-Cu uye O/Ar, pakati pevamwe.
-Chinyorwa ichi chakaburitswa navacuum coating machine mugadziriGuangdong Zhenhua
Nguva yekutumira: Jan-18-2024