Vacuum cathode arc ioncoating inodimburirwa sevacuum arccoating. Kana maviri kana anopfuura vacuum arc evaporation masosi (anonzi arc masosi) akashandiswa, inonzi multi arc ion.cokudya kana kuwanda arccoating. Iyo vacuum ion coating tekinoroji inoshandisa vacuum arc discharge kune evaporation masosi. Kusiyana neiyo inopisa erekitironi arc yehollow cathode discharge, iyo arc fomu ndeyekuumbwa kwecathode arc mavara pamusoro peinotonhora cathode.
Hunhu hwevacuum cathode arc ioncokudya ndiko:
(1) Iyo evaporation sosi ndeye yakasimba cathode target, iyo inoburitsa zvakananga plasma kubva kune cathode target source pasina kudiwa kwedziva rakanyungudutswa. Iyo arc yakananga sosi inogona kurongeka mune chero nzira uye akawanda masosi kuti ive nechokwadi chekupfeka yunifomu.
(2) Chimiro chemidziyo chiri nyore, pasina kudiwa kwekushanda gasi kana nzira dzekubatsira ionization. Iyo arc yakananga sosi haingori evaporation sosi yezvinhu zvecathode, asiwo ion sosi; Munguva ye reactive deposition, chete reactive gasi riripo, uye mhepo inodzorwa nekushandisa nyore kuzere kumanikidza kutonga.
(3) The ionization rate yakakwirira, kazhinji inosvika 60% ~ 80%, uye deposition rate yakakwirira.
(4) Chiitiko ion simba rakakwirira, uye firimu / substrate bonding simba refirimu rakaiswa rakanaka.
(5) Kushandisa yakaderera voltage magetsi ekushanda zvakachengeteka.
(6) Inogona kuisa simbi mafirimu, alloy mafirimu, kuita uye synthesize akasiyana emukomboni mafirimu (ammonia compounds, carbides, oxides), uye kunyange synthesize DLC mafirimu, CN mafirimu, etc. Kuipa kwayo ndeyokuti panguva yekuisa, madonhwe maduku emvura anoputika kubva pane chinangwa chepamusoro, icho chinoputika mumucheka wakaoma wefirimu. Parizvino, nzira dzakawanda dzinoshanda dzakadzidzwa kuderedza uye kubvisa aya madiki madonhwe.
Vacuum arc ioncotekinoroji yekugadzira yakashandiswa zvakanyanya kupfekedza superhard yekudzivirira maturusi emidziyo uye mold. Zvirongwa zvemafirimu zvinosanganisira TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, etc. Zvigadzirwa zvekuputira zvinosanganisira zvishandiso, molds, etc. Panyaya yekutevedzera goridhe uye ruvara rwekushongedza kwekudzivirira kwekudzivirira, maitiro efirimu anosanganisira TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ONC firimu, ZrN firimu, etc. dema, dema, pepuru, shava, bhuruu Green grey, nezvimwe.
Multi arc ioncoKuisa kune zvakasiyana-siyana zvekushandisa uye kushanda kwakasimba, kunyanya mukupfekedza kushongedza uye kusagadzika-resistant mafirimu akaomeswa akaturikidzana pamusoro pezvinhu zvakadai sematurusi ekucheka, mold, uye simbi isina tsvina.
Nguva yekutumira: Aug-17-2023