Ibiranga bifatika bifatika Ibiranga na Porogaramu

Muburyo bwo gutwikisha ibintu, ibice bishobora gukoreshwa nkintego zo gutegura firime ya chimique. Nyamara, ibihimbano bya firime byakozwe nyuma yo gutondeka ibikoresho bigenewe akenshi bitandukana cyane nibigize umwimerere wibikoresho bigenewe, bityo bikaba bitujuje ibisabwa muburyo bwambere. Niba intego yicyuma isukuye ikoreshwa, gaze isabwa (urugero, ogisijeni mugihe utegura firime ya okiside) ivangwa mubushake bwa gaze ikora (gusohora), kuburyo ifata imiti hamwe nibikoresho bigenewe gukora firime yoroheje ishobora kugenzurwa ukurikije imiterere n'ibiyiranga. Ubu buryo bakunze kwitwa "reaction sputtering".

Nkuko byavuzwe haruguru, RF sputtering irashobora gukoreshwa mukubitsa firime ya dielectric na firime zitandukanye. Ariko, kugirango utegure firime "yera", birakenewe kugira intego "yera", okiside yuzuye cyane, nitride, karbide, cyangwa ifu yimbuto. Gutunganya iyi poro mumigambi yuburyo runaka bisaba kongeramo inyongeramusaruro zikenewe mugushushanya cyangwa gucumura, ibyo bigatuma igabanuka rikomeye ryubuziranenge bwintego hamwe na firime yavuyemo. Mu gusohora kwinshi, ariko, kubera ko ibyuma byera cyane hamwe na gaze zifite isuku nyinshi birashobora gukoreshwa, haratangwa uburyo bworoshye bwo gutegura firime zifite isuku nyinshi. Imyitozo ngororamubiri yongeye kwitabwaho mu myaka yashize kandi yabaye uburyo bukomeye bwo kugwa muri firime zoroheje zikora ibintu bitandukanye. Yakoreshejwe cyane mugukora ibice bya IV, I- na IV-V, semiconductor zisubiza inyuma, hamwe na okiside zitandukanye, nko gukoresha polycrystalline Si na CH./Ivangavanga imyuka yo kurasa imvura ya firime yoroheje ya SiC, Ti intego na N / Ar kugirango bategure firime zikomeye za TiN, Ta na O / Ar gutegura TaO; firime ya dielectric yoroheje, Fe na O, / Ar gutegura -FezO; -FezO. gufata amashusho, AIN piezoelectric ya firime hamwe na A1 na N / Ar, A1-CO yatoranije gutoranya hamwe na AI na CO / Ar, hamwe na YBaCuO-superconducting hamwe na Y-Ba-Cu na O / Ar, nibindi.

–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua