Makhalidwe ndi Kagwiritsidwe Ntchito ka Kupaka kwa Reactive Sputtering

Popaka sputtering, mankhwala angagwiritsidwe ntchito ngati chandamale pokonzekera mafilimu opangidwa ndi mankhwala. Komabe, mapangidwe a filimuyo omwe amapangidwa pambuyo pa sputtering wa zinthu zomwe akufunafuna nthawi zambiri zimasiyana kwambiri ndi zomwe zimapangidwira poyamba, choncho sizikukwaniritsa zofunikira za mapangidwe oyambirira. Ngati chitsulo choyera chikugwiritsidwa ntchito, mpweya wofunikira wofunikira (mwachitsanzo, mpweya pamene ukukonzekera mafilimu a oxide) umasakanizidwa mwachidwi mu gasi yogwira ntchito (yotulutsa), kotero kuti imakhudzidwa ndi mankhwala ndi zinthu zomwe zikugwiritsidwa ntchito kuti apange filimu yopyapyala yomwe ingathe kuyendetsedwa molingana ndi kapangidwe kake ndi mawonekedwe ake. Njira imeneyi nthawi zambiri imatchedwa "reaction sputtering".

Monga tanena kale, RF sputtering itha kugwiritsidwa ntchito kuyika mafilimu a dielectric ndi makanema osiyanasiyana. Komabe, kuti mukonzekere filimu "yoyera", m'pofunika kukhala ndi cholinga "choyera", oxide yapamwamba kwambiri, nitride, carbide, kapena ufa wina wamagulu. Kukonza ma ufawa kukhala chandamale cha mawonekedwe enaake kumafuna kuwonjezera zowonjezera zofunikira pakuwumba kapena kupukuta, zomwe zimabweretsa kuchepa kwakukulu kwa chiyero cha chandamale ndi filimuyo. Pakupopera kokhazikika, komabe, popeza zitsulo zoyera kwambiri ndi mpweya woyeretsedwa kwambiri zingagwiritsidwe ntchito, zinthu zosavuta zimaperekedwa pokonzekera mafilimu apamwamba. Kulankhulirana kwamphamvu kwalandira chidwi chochulukirapo m'zaka zaposachedwa ndipo yakhala njira yayikulu yochepetsera mafilimu opyapyala amitundu yosiyanasiyana yogwira ntchito. Amagwiritsidwa ntchito kwambiri popanga mankhwala a IV, I- ndi IV-V, refractory semiconductors, ndi ma oxides osiyanasiyana, monga kugwiritsa ntchito polycrystalline Si ndi CH./Ar osakaniza mpweya kuwombera mpweya wa SiC mafilimu woonda, Ti chandamale ndi N/Ar kukonzekera TiN mafilimu olimba, Ta ndi O/Ar kukonzekera TaO; dielectric mafilimu woonda, Fe ndi O,/Ar kukonzekera -FezO; -FezO. mafilimu ojambulira, mafilimu a AIN piezoelectric okhala ndi A1 ndi N/Ar, A1-CO mafilimu osankhidwa a AI ndi CO/Ar, ndi mafilimu a YBaCuO-superconducting ndi Y-Ba-Cu ndi O/Ar, pakati pa ena.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumGuangdong Zhenhua