Vacuum cathode arc ioncoating amafupikitsidwa ngati vacuum arccokudya. Ngati magwero awiri kapena angapo a vacuum arc evaporation (otchedwa arc sources) agwiritsidwa ntchito, amatchedwa multi arc ion.cokuzizira kapena ma multi arccokudya. Ndi ukadaulo wa vacuum ion coating womwe umagwiritsa ntchito vacuum arc discharge potulutsa mpweya. Mosiyana ndi kutentha kwa electron arc ya hollow cathode discharge, mawonekedwe ake arc ndi mapangidwe a cathode arc mawanga pamwamba pa cathode yozizira.
Makhalidwe a vacuum cathode arc ioncozowerengera ndi:
(1) Gwero la evaporation ndi chandamale cholimba cha cathode, chomwe chimatulutsa mwachindunji plasma kuchokera ku gwero la cathode popanda kufunikira kwa dziwe losungunuka. Gwero la chandamale cha arc litha kukonzedwa mbali iliyonse ndi magwero angapo kuti zitsimikizire kuti zokutira zofananira.
(2) Kapangidwe ka zida ndi kosavuta, popanda kufunikira kwa gasi kapena njira zothandizira ionization. Arc chandamale gwero si gwero evaporation kwa zinthu cathode, komanso gwero ion; Pakuyika kwamphamvu, mpweya wokhawokha umakhalapo, ndipo mlengalenga umayendetsedwa pogwiritsa ntchito njira yosavuta yowongolera mphamvu.
(3) Kuchuluka kwa ionization ndikwambiri, nthawi zambiri kumafika 60% ~ 80%, ndipo kuchuluka kwamafuta ndikokwera.
(4) Mphamvu ya ion yochitika ndi yayikulu, ndipo mphamvu yolumikizira filimu / gawo lapansi la filimu yoyikidwa ndi yabwino.
(5) Kugwiritsa ntchito magetsi otsika mphamvu kuti agwire bwino ntchito.
(6) Ikhoza kuyika mafilimu azitsulo, mafilimu a aloyi, imachita ndi kupanga mafilimu osiyanasiyana (ammonia mankhwala, carbides, oxides), komanso ngakhale kupanga mafilimu a DLC, mafilimu a CN, ndi zina zotero. Pakadali pano, njira zambiri zogwira mtima zaphunziridwa kuti zichepetse ndikuchotsa madontho ang'onoang'ono awa.
Vacuum arc ioncoukadaulo wa ating wagwiritsidwa ntchito kwambiri kuvala zokutira zoteteza kwambiri pazida ndi nkhungu. Machitidwe a mafilimu akuphatikizapo TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, ndi zina zotero. Zopangira zophimba zimaphatikizapo zida, nkhungu, ndi zina zotero. Ponena za kutsanzira golide ndi mitundu yodzitetezera yodzitetezera, machitidwe a mafilimu akuphatikizapo TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ONC filimu, ZrN C. wakuda, wakuda, wofiirira, wofiirira, wabuluu Green imvi, etc.
Multi arc ioncoKupaka kumakhala ndi ntchito zambiri komanso kuchitapo kanthu mwamphamvu, makamaka pakupaka zigawo zolimba zokongoletsa komanso zosavala zosagwira ntchito pamalo azinthu monga zida zodulira, nkhungu, ndi mbale zachitsulo zosapanga dzimbiri.
Nthawi yotumiza: Aug-17-2023