Nkọwa nke Vacuum Cathode Arc Ion mkpuchi

Vacuum cathode arc ioncoA na-akpọchi iri nri dị ka oghere ogherecona-eri nri. Ọ bụrụ na ejiri ụzọ abụọ ma ọ bụ karịa vacuum arc evaporation isi mmalite (nke a na-akpọ arc isi mmalite), a na-akpọ ya multi arc ion.coagba ma ọ bụ multi arccona-eri nri. Ọ bụ teknụzụ mkpuchi vacuum ion nke na-eji vacuum arc drain maka isi mmalite evaporation. N'adịghị ka ọkụ eletrik na-ekpo ọkụ nke oghere cathode oghere, ọdịdị arc ya bụ nhazi nke cathode arc ntụpọ n'elu cathode oyi.

Njirimara nke oghere cathode arc ioncoihe ndị bụ:

(1) Isi iyi nke evaporation bụ ebumnuche cathode siri ike, nke na-ewepụta plasma ozugbo sitere na ebe ebumnuche cathode na-enweghị mkpa ọdọ mmiri a wụrụ awụ. Enwere ike ịhazi isi iyi arc n'akụkụ ọ bụla yana ọtụtụ isi mmalite iji hụ na mkpuchi otu.

(2) Usoro akụrụngwa dị mfe, na-enweghị mkpa maka gas na-arụ ọrụ ma ọ bụ ụzọ ionization inyeaka. Isi mmalite nke arc abụghị naanị isi iyi evaporation maka ihe cathode, kamakwa isi iyi ion; N'oge ntinye mmeghachi omume, ọ bụ naanị gas na-emeghachi omume dị, a na-achịkwa ikuku site na iji njikwa nrụgide zuru oke.

(3) Ọnụ ọgụgụ ionization dị elu, na-erukarị 60% ~ 80%, na ntinye ego dị elu.

(4) Ike ion ahụ merenụ dị elu, na ike njikọ ihe nkiri / substrate nke ihe nkiri echekwara dị mma.

(5) Iji obere ọkụ eletrik maka ịrụ ọrụ nchekwa.

(6) Ọ nwere ike idobe metal fim, alloy film, meghachi omume na synthesize dị iche iche compound film (amonia ogige, carbides, oxides), na ọbụna synthesize DLC fim, CN fim, wdg Ya mwepu bụ na n'oge deposition, obere ụmụ irighiri mmiri mmiri na-splashed si lekwasịrị n'elu, nke condense na ntekwasa film oyi akwa na-amụba ihe nkiri oyi akwa. Ugbu a, a mụọla ọtụtụ ụzọ dị irè iji belata ma kpochapụ ụmụ irighiri mmiri ndị a.

Vacuum arc ioncoA na-eji teknụzụ nri eme ihe n'ọtụtụ ebe iji kpuchie mkpuchi nchebe siri ike maka ngwaọrụ na ihe ọkpụkpụ. Usoro ihe nkiri gụnyere TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, wdg Ngwaahịa mkpuchi na-agụnye ngwá ọrụ, ihe ọkpụkpụ, wdg N'ihe gbasara ọla edo na-eṅomi na ihe mkpuchi nchebe na-achọ mma, usoro ihe nkiri gụnyere TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ONr system, black, TONC, wdg. nwa, odo odo, aja aja, acha anụnụ anụnụ Green isi awọ, wdg.

Multi arc ioncoAting nwere ọtụtụ ngwa ngwa na arụmọrụ siri ike, ọkachasị na mkpuchi ihe eji achọ mma na akwa ihe nkiri siri ike na-eyi n'elu ihe ndị dị ka ngwaọrụ ịkpụ, ihe ịkpụzi, na efere igwe anaghị agba nchara.