ʻO Reactive Sputtering Coating Nā ʻano a me nā noi

Ma ke kaʻina hana hoʻoheheʻe sputtering, hiki ke hoʻohana ʻia nā mea hoʻohui i mau pahuhopu no ka hoʻomākaukau ʻana i nā kiʻiʻoniʻoni chemically synthesized. Eia nō naʻe, ʻo ka haku mele ʻana o ka kiʻiʻoniʻoni i hana ʻia ma hope o ka sputtering o ka mea i hoʻopaʻa ʻia e hoʻokaʻawale pinepine ʻia mai ka haku mua o ka mea i hoʻopaʻa ʻia, a no laila ʻaʻole i kūpono i nā koi o ka hoʻolālā kumu. Inā hoʻohana ʻia kahi pahu metala maʻemaʻe, ua hui pū ʻia ke kinoea ikaika e koi ʻia (e like me ka oxygen i ka wā e hoʻomākaukau ai i nā kiʻi ʻoniʻoni oxide) i loko o ke kinoea hana (hoʻokuʻu ʻia), no laila e hana kemika me ka mea i makemake ʻia e hana i kahi kiʻiʻoniʻoni lahilahi hiki ke hoʻomalu ʻia ma ke ʻano o kona haku mele ʻana a me nā ʻano. ʻO kēia ʻano hana i kapa ʻia ʻo "rection sputtering".

E like me ka mea i ʻōlelo mua ʻia, hiki ke hoʻohana ʻia ka RF sputtering e waiho i nā kiʻiʻoniʻoni dielectric a me nā kiʻiʻoniʻoni hui like ʻole. Eia nō naʻe, no ka hoʻomākaukau ʻana i kahi kiʻiʻoniʻoni "maʻemaʻe", pono e loaʻa i kahi pahuhopu "maʻemaʻe", kahi oxide maʻemaʻe kiʻekiʻe, nitride, carbide, a i ʻole ka pauka hui. ʻO ka hana ʻana i kēia mau pauka i loko o kahi pahu hopu o kekahi ʻano e pono ai ka hoʻohui ʻana i nā mea hoʻohui e pono ai no ka hoʻoheheʻe ʻana a i ʻole ka sintering, kahi e hōʻemi nui ai i ka maʻemaʻe o ka pahuhopu a me ka hopena kiʻiʻoniʻoni. I ka reactive sputtering, akā naʻe, no ka mea hiki ke hoʻohana ʻia nā metala maʻemaʻe kiʻekiʻe a me nā kinoea hoʻomaʻemaʻe kiʻekiʻe, hāʻawi ʻia nā kūlana kūpono no ka hoʻomākaukau ʻana i nā kiʻiʻoniʻoni kiʻekiʻe. Ua loaʻa ka manaʻo nui o ka sputtering reactive i nā makahiki i hala iho nei a ua lilo ia i kumu nui no ka hoʻokahe ʻana i nā kiʻiʻoniʻoni lahilahi o nā pūhui hana like ʻole. Ua hoʻohana nui ʻia i ka hana ʻana o IV, I- a me IV-V pūhui, refractory semiconductors, a me nā ʻano oxides like ʻole, e like me ka hoʻohana ʻana i ka polycrystalline Si a me CH./Ar hui ʻana o nā kinoea e pana i ka ua o nā kiʻi ʻoniʻoni SiC, Ti target a me N / Ar e hoʻomākaukau i nā kiʻi paʻakikī TiN, Ta a me O / Ar e hoʻomākaukau iā TaO; nā kiʻiʻoniʻoni lahilahi dielectric, Fe a me O,/Ar e hoʻomākaukau -FezO; -FezO. hoʻopaʻa kiʻiʻoniʻoni, AIN piezoelectric kiʻiʻoniʻoni me A1 a me N / Ar, A1-CO koho koho absorption kiʻiʻoniʻoni me AI a me CO / Ar, a me YBaCuO-superconducting kiʻiʻoniʻoni me Y-Ba-Cu a me O / Ar, i waena o kekahi.

-Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini hoʻopaʻa haʻahaʻaGuangdong Zhenhua