Ka nānā 'ana o ka Vacuum Cathode Arc Ion Coating

ʻO ka ion arc cathode vacuumcoHoʻopau ʻia ʻo aton ma ke ʻano he vacuum arccoe hana ana. Inā hoʻohana ʻia ʻelua a ʻoi aʻe paha nā kumu hoʻoheheʻe ʻana o ka pahu hau (i ʻōlelo ʻia ma ke ʻano he kumu arc), ua kapa ʻia ʻo ia ka multi arc ion.coʻāpana a multi arccoe hana ana. ʻO ia kahi ʻenehana hoʻoheheʻe ion e hoʻohana ana i ka hoʻokuʻu ʻana i ka pahu hau no nā kumu evaporation. ʻAʻole e like me ka electron arc wela o ka hollow cathode discharge, kona ʻano arc ka hoʻokumu ʻana i nā kiko cathode arc ma ka ʻili o ka cathode anu.

ʻO nā hiʻohiʻona o ka vacuum cathode arc ioncoʻo nā:

(1) ʻO ke kumu hoʻoheheʻe he pahu cathode paʻa, nāna e hoʻopuka pololei i ka plasma mai ke kumu hoʻoheheʻe cathode me ka ʻole o ka wai hoʻoheheʻe. Hiki ke hoʻonohonoho ʻia ke kumu pahuhopu arc ma kēlā me kēia ʻaoʻao a me nā kumu he nui e hōʻoia i ka uhi like ʻana.

(2) He mea maʻalahi ke ʻano o nā mea hana, me ka ʻole o ka pono o ka hana kinoea a i ʻole nā ​​​​ʻano ionization kōkua. ʻAʻole wale ke kumu hoʻoheheʻe ʻia no ka mea cathode, akā he kumu ion kekahi; I ka wā o ka hoʻoheheʻe ʻana, aia wale nō ke kinoea reactive, a ua hoʻomalu ʻia ka lewa me ka hoʻohana ʻana i ka mana kaomi piha maʻalahi.

(3) He kiʻekiʻe ka nui o ka ionization, hiki i ka 60% ~ 80%, a kiʻekiʻe ka nui o ka deposition.

(4) He kiʻekiʻe ka ikehu ion hanana, a maikaʻi ke kiʻiʻoniʻoni / substrate hoʻopaʻa ikaika o ke kiʻi i waiho ʻia.

(5) Ke hoʻohana nei i kahi mana uila haʻahaʻa no ka hana palekana.

(6) Hiki iā ia ke waiho i nā kiʻiʻoniʻoni metala, nā kiʻi ʻoniʻoni, hana a synthesize i nā kiʻi ʻoniʻoni like ʻole (ammonia compounds, carbide, oxides), a hiki i ka synthesize DLC films, CN films, etc. I kēia manawa, ua aʻo ʻia nā ala kūpono e hōʻemi a hoʻopau i kēia mau micro droplets.

ʻIona arc vacuumcoUa hoʻohana nui ʻia ka ʻenehana no ka ʻaʻahu ʻana i nā pale pale paʻa loa no nā mea hana a me nā poni. ʻO nā ʻōnaehana kiʻiʻoniʻoni e pili ana iā TiN, ZrN, HfN, TiAIN, TiC, TiNC, CrN, Al2O3, DLC, etc. ʻO nā huahana Coating nā mea hana, molds, etc. Ma ke ʻano o ke gula hoʻohālike a me ka waihoʻoluʻu hoʻonani pale pale, nā ʻōnaehana kiʻiʻoniʻoni me TiN, ZrN, TiAIN, TiAINC, TC, TiNC, DLC, Ti-ON, TONC, kiʻiʻoniʻoni ʻeleʻele, ʻeleʻele pū ʻeleʻele. ʻeleʻele, uliuli ʻōmaʻomaʻo hina, etc.

Ion arc lehulehucoLoaʻa i ka Ating ka laulā o nā noi a me ka hoʻomaʻamaʻa ikaika, ʻoi aku ka nui o ka uhi ʻana i nā papa kiʻi ʻoniʻoni paʻa paʻa ʻole ma luna o nā ʻili o nā mea e like me nā mea ʻoki ʻoki, nā ʻōpala, a me nā pā kila kila.