A cikin tsarin suturar sputtering, ana iya amfani da mahadi azaman maƙasudi don shirya fina-finai da aka haɗa ta sinadarai. Duk da haka, abubuwan da ke tattare da fim din da aka haifar bayan zubar da kayan da aka yi niyya sau da yawa ya bambanta da yawa daga ainihin abubuwan da aka yi niyya, sabili da haka bai cika buƙatun ƙirar asali ba. Idan an yi amfani da maƙasudin ƙarfe mai tsafta, iskar gas ɗin da ake buƙata (misali, iskar oxygen lokacin shirya fina-finai na oxide) ana haɗe shi da sane a cikin iskar gas ɗin aiki (fitarwa), ta yadda zai amsa sinadarai tare da abin da ake nufi don samar da fim na bakin ciki wanda za'a iya sarrafa shi dangane da abun da ke ciki da halayensa. Ana kiran wannan hanyar a matsayin "haɗaɗɗen amsawa".
Kamar yadda aka ambata a baya, RF sputtering za a iya amfani da su saka dielectric fina-finai da daban-daban mahadi fina-finai. Duk da haka, don shirya fim din "tsabta", ya zama dole don samun manufa "tsabta", babban oxide mai tsabta, nitride, carbide, ko sauran foda. Sarrafa waɗannan foda a cikin wani maƙasudin wani nau'i na buƙatar ƙarin abubuwan da ake buƙata don gyare-gyare ko gyare-gyare, wanda ya haifar da raguwa mai mahimmanci a cikin tsarki na manufa da kuma sakamakon fim. A cikin reactive sputtering, duk da haka, tun da high-tsabta karafa da high-tsarki gas za a iya amfani da, m yanayi da aka samar domin shirye-shiryen na high-tsarki fina-finai. Reactive sputtering ya sami ƙarin kulawa a cikin 'yan shekarun nan kuma ya zama babbar hanya don ƙaddamar da fina-finai na bakin ciki na mahaɗan ayyuka daban-daban. An yadu amfani a yi na IV, I- da IV-V mahadi, refractory semiconductors, da kuma iri-iri na oxides, kamar yin amfani da polycrystalline Si da CH./Ar cakuda gas don harba hazo na SiC bakin ciki fina-finai, Ti manufa da kuma N / Ar shirya TiN wuya fina-finai, Ta da O / Ar shirya TaO; dielectric bakin ciki fina-finai, Fe da O, / Ar shirya -FezO; -FAZO. rikodi fina-finai, AIN piezoelectric fina-finai tare da A1 da N / Ar, A1-CO zažužžukan sha fina-finai tare da AI da CO / Ar, da YBaCuO-superconducting fina-finai tare da Y-Ba-Cu da O / Ar, da sauransu.
–An fitar da wannan labarininjin shafa injin injinGuangdong Zhenhua
Lokacin aikawa: Janairu-18-2024