I-vacuum ion plating (i-ion plating ngamafuphi) ubuchwepheshe obusha bokwelapha ubuso obuthuthukiswa ngokushesha ngawo-1970, obaphakanyiswa yi-DM Mattox we-Somdia Company e-United States ngo-1963. Ibhekisela enkambisweni yokusebenzisa umthombo wokuhwamuka noma ithagethi yokuphalaza ukuze kuphele noma kuphalaze izinto zefilimu emoyeni we-vacuum.
Okokuqala ukukhiqiza umusi wensimbi ngokushisa nokuhwamukisa izinto zefilimu, ezifakwa kancane kwi-ion zibe umusi wensimbi kanye nama-athomu angathathi hlangothi anamandla aphezulu esikhaleni se-plasma yokukhishwa kwegesi, bese zifika kwi-substrate ukuze zakhe ifilimu ngesenzo sensimu kagesi; lokhu kokugcina kusebenzisa ama-ion anamandla aphezulu (Isibonelo, i-Ar+) kuqhuma ubuso bezinto zefilimu ukuze izinhlayiya ezigxotshiwe zifakwe kwi-ion zibe ama-ion noma ama-athomu angathathi hlangothi anamandla aphezulu esikhaleni sokukhishwa kwegesi, bese zenza ubuso be-substrate bube ifilimu.
Lesi sihloko sishicilelwe yiGuangdong Zhenhua, umkhiqizi weimishini yokumboza nge-vacuum
Isikhathi sokuthunyelwe: Mashi-10-2023