I-vacuum ion plating (i-ion plating ngokufutshane) bubuchwephesha obutsha bonyango lomphezulu olwaphuhliswa ngokukhawuleza ngeminyaka yoo-1970, olwandululwa nguDM Mattox weNkampani yeSomdia eMelika ngo-1963. Ithagethi yokukhupha umphunga okanye ukutshiza imathiriyeli yefilimu kumoya wevacuum.
Eyangaphambili kukuvelisa umphunga wesinyithi ngokufudumeza kunye nokukhupha izinto zefilimu, ezifakwe kwi-ionized ibe ngumphunga wesinyithi kunye ne-athomu ephezulu yamandla angathathi hlangothi kwindawo yokukhupha igesi yeplasma, kwaye ifikelele kwi-substrate ukwenza ifilimu ngesenzo sommandla wombane. ;Le yokugqibela isebenzisa ii-ion zamandla aphezulu (Umzekelo, i-Ar+) ibhobhoza umphezulu wemathiriyeli yefilimu ukuze amasuntswana achithekileyo afakwe kwi-ion okanye ii-athom ezingathathi hlangothi zamandla aphezulu kwisithuba sokukhutshwa kwegesi, kwaye aqonde umphezulu we-substrate. ukwenza ifilimu.
Eli nqaku lipapashwe ngu Guangdong Zhenhua, umenzi weizixhobo zokugquma ivacuum
Ixesha lokuposa: Mar-10-2023