I-vacuum ion plating (i-ion plating ngamafutshane) yiteknoloji entsha yonyango lomphezulu eyaphuhliswa ngokukhawuleza ngeminyaka yoo-1970, eyacetywayo nguDM Mattox weSomdia Company eMelika ngo-1963. Ibhekisa kwinkqubo yokusebenzisa umthombo wokufuma okanye injongo yokutshiza ukuze kuphume okanye kutshizwe izinto zefilimu emoyeni ongenanto.
Eyokuqala kukuvelisa umphunga wesinyithi ngokufudumeza nokufutha izinto zefilimu, ezithi zibe yi-ion ngokwenxalenye zibe yi-metal vapor kunye nee-atoms ezingathathi hlangothi ezinamandla aphezulu kwindawo yeplasma yokukhupha igesi, kwaye zifikelele kwi-substrate ukuze zenze ifilimu ngesenzo sentsimi yombane; eyesibini isebenzisa ii-ions ezinamandla aphezulu (Umzekelo, i-Ar+) iqhuma kumphezulu wezinto zefilimu ukuze amasuntswana atshiziweyo abe yi-ion okanye ii-atoms ezingathathi hlangothi ezinamandla aphezulu kwindawo yokukhupha igesi, kwaye zifezekise umphezulu we-substrate ukuze zenze ifilimu.
Eli nqaku lipapashwe nguGuangdong Zhenhua, umenzi weizixhobo zokugquma nge-vacuum
Ixesha lokuthumela: Matshi-10-2023