Lub tshuab nqus tsev ion plating (ion plating luv luv) yog ib txoj kev kho tshiab uas tau tsim kho sai sai hauv xyoo 1970, uas tau thov los ntawm DM Mattox ntawm Somdia Company hauv Tebchaws Meskas xyoo 1963. Nws hais txog cov txheej txheem ntawm kev siv cov khoom siv evaporation lossis sputtering target los evaporate lossis sputtering cov khoom siv zaj duab xis hauv huab cua nqus tsev.
Tus thawj yog los tsim cov pa hlau los ntawm kev ua kom sov thiab ua kom cov khoom siv zaj duab xis, uas yog ib feem ionized rau hauv cov pa hlau thiab cov atoms nruab nrab muaj zog hauv qhov chaw tso pa tawm, thiab ncav cuag lub substrate los tsim ib zaj duab xis los ntawm kev ua haujlwm ntawm lub zog hluav taws xob; qhov kawg siv cov ions muaj zog siab (Piv txwv li, Ar +) bombards qhov chaw ntawm cov khoom siv zaj duab xis kom cov khoom tawg tau ionized rau hauv ions lossis cov atoms nruab nrab muaj zog siab los ntawm qhov chaw ntawm cov roj tso tawm, thiab paub qhov chaw ntawm lub substrate los tsim ib zaj duab xis.
Tsab xov xwm no yog luam tawm los ntawm Guangdong Zhenhua, lub chaw tsim khoom ntawmcov khoom siv nqus tsev txheej
Lub sijhawm tshaj tawm: Lub Peb Hlis-10-2023