Njengoba sonke sazi, incazelo ye-semiconductor iwukuthi inomoya ohambayo phakathi kwabaqhubi bomoya kanye nabavikeli, ukumelana phakathi kwensimbi kanye ne-insulator, okuvame ukuba semazingeni okushisa asekamelweni kungaphakathi kwebanga elingu-1mΩ-cm ~ 1GΩ-cm. Eminyakeni yamuva nje, ukugqoka kwe-vacuum semiconductor ezinkampanini ezinkulu ze-semiconductor, kusobala ukuthi isimo sayo siphezulu kakhulu, ikakhulukazi kwezinye izindlela ezinkulu zokucwaninga ngobuchwepheshe bokuthuthukiswa kwesekethe yesistimu ehlanganisiwe kumadivayisi okuguqulwa kwe-magnetoelectric, amadivayisi akhipha ukukhanya kanye neminye imisebenzi yokuthuthukisa. Ukugqoka kwe-vacuum semiconductor kunendima ebalulekile.
Ama-semiconductor abonakala ngezici zawo zangaphakathi, izinga lokushisa kanye nokugcwala kokungcola. Izinto zokumboza ze-vacuum semiconductor zihlukaniswa kakhulu ngama-compounds azo. Cishe zonke zisekelwe ku-boron, i-carbon, i-silicon, i-germanium, i-arsenic, i-antimony, i-tellurium, i-iodine, njll., kanti ezinye zimbalwa kakhulu i-GaP, i-GaAs, i-lnSb, njll.. Kukhona nezinye i-oxide semiconductors, njenge-FeO, i-Fe₂O₃, i-MnO, i-Cr₂O₃, i-Cu₂O, njll.
Ukuhwamuka kwe-vacuum, ukumbozwa okukhafulayo, ukumbozwa kwe-ion kanye neminye imishini kungenza ukumbozwa kwe-vacuum semiconductor. Le mishini yokumboza ihlukile ngokomgomo wayo wokusebenza, kodwa yonke yenza ukumbozwa kwezinto ze-semiconductor ezibekwe ku-substrate, futhi njengezinto ze-substrate, akukho mfuneko, kungaba yi-semiconductor noma cha. Ngaphezu kwalokho, ukumbozwa okunezakhiwo ezahlukene zikagesi nezokukhanya kungalungiswa ngokusakazwa kokungcola kanye nokufakelwa kwe-ion ebusweni be-substrate ye-semiconductor ebangeni elithile. Isendlalelo esincane esiphumelayo singacutshungulwa njengesimbozo se-semiconductor ngokuvamile.
Ukugqoka i-vacuum semiconductor kuyinto ebalulekile kuma-elekthronikhi kungakhathaliseki ukuthi kumadivayisi asebenzayo noma angasebenzi. Ngokuthuthuka okuqhubekayo kobuchwepheshe bokugqoka i-vacuum semiconductor, ukulawulwa okunembile kokusebenza kwefilimu kuye kwenzeka.
Eminyakeni yamuva nje, ukugqoka okungaguquki kanye nokugqoka okune-polycrystalline kuye kwathuthuka ngokushesha ekukhiqizweni kwamadivayisi e-photoconductive, amashubhu e-field-effect ahlanganisiwe, kanye namaseli elanga asebenza kahle kakhulu. Ngaphezu kwalokho, ngenxa yokuthuthukiswa kokugqoka kwe-vacuum semiconductor kanye nefilimu encane yezinzwa, okunciphisa kakhulu ubunzima bokukhethwa kwezinto futhi kwenza inqubo yokukhiqiza ibe lula kancane kancane. Imishini yokugqoka ye-vacuum semiconductor isibe yinto edingekayo ekusetshenzisweni kwe-semiconductor. Imishini isetshenziswa kabanzi ekugqokeni kwe-semiconductor kwamadivayisi ekhamera, amaseli elanga, ama-transistors ahlanganisiwe, ukukhishwa kwensimu, ukukhanya kwe-cathode, ukukhishwa kwe-electron, izinto zokuzwa kwefilimu encane, njll.
Umugqa wokumboza we-magnetron sputtering uklanywe ngohlelo lokulawula oluzenzakalelayo ngokuphelele, isikhombikubona sesikrini sokuthinta esilula nesinembile. Umugqa uklanywe ngemenyu yokusebenza ephelele ukuze kufezwe ukuqapha okugcwele isimo sokusebenza kwezingxenye zomugqa wokukhiqiza, ukusethwa kwepharamitha yenqubo, ukuvikelwa kokusebenza kanye nemisebenzi ye-alamu. Lonke uhlelo lokulawula kagesi luphephile, luthembekile futhi luzinzile. Luhlonyiswe ngethagethi yokumboza ye-magnetron enezinhlangothi ezimbili ephezulu nephansi noma uhlelo lokumboza olunezinhlangothi ezimbili.
Imishini isetshenziswa kakhulu kumabhodi wesekethe ka-ceramic, ama-capacitor ane-chip high-voltage kanye nezinye izinto ezimbozwa yi-substrate, izindawo eziyinhloko zokusetshenziswa amabhodi wesekethe kagesi.
Isikhathi sokuthunyelwe: Novemba-07-2022