Raws li peb txhua tus paub, lub ntsiab lus ntawm semiconductor yog tias nws muaj kev coj ua ntawm cov neeg coj qhuav thiab cov insulators, resistivity ntawm hlau thiab insulator, uas feem ntau yog nyob rau hauv chav tsev kub yog nyob rau hauv qhov ntau ntawm 1mΩ-cm ~ 1GΩ-cm. Nyob rau hauv xyoo tas los no, lub tshuab nqus tsev semiconductor txheej hauv cov tuam txhab semiconductor loj, nws yog qhov tseeb tias nws cov xwm txheej yog nce siab, tshwj xeeb tshaj yog nyob rau hauv qee qhov kev tshawb fawb loj-scale integrated system circuit kev loj hlob technology txoj kev tshawb fawb rau magnetoelectric hloov khoom siv, lub teeb-emitting khoom siv thiab lwm yam kev loj hlob ua haujlwm. Lub tshuab nqus tsev semiconductor txheej muaj lub luag haujlwm tseem ceeb.
Cov khoom siv semiconductor muaj cov yam ntxwv ntawm lawv tus kheej, qhov kub thiab qhov tsis huv. Cov khoom siv txheej semiconductor nqus tsev feem ntau yog sib txawv los ntawm nws cov khoom sib xyaw. Kwv yees li txhua yam yog ua los ntawm boron, carbon, silicon, germanium, arsenic, antimony, tellurium, iodine, thiab lwm yam, thiab qee qhov tsawg dua GaP, GaAs, lnSb, thiab lwm yam. Kuj tseem muaj qee cov oxide semiconductors, xws li FeO, Fe₂O₃, MnO, Cr₂O₃, Cu₂O, thiab lwm yam.
Cov khoom siv nqus tsev vacuum evaporation, sputtering coating, ion coating thiab lwm yam khoom siv tuaj yeem ua cov txheej semiconductor nqus tsev vacuum. Cov khoom siv txheej no txawv ntawm lawv txoj haujlwm, tab sis lawv txhua tus ua rau cov khoom siv semiconductor txheej tso rau ntawm lub substrate, thiab ua cov khoom siv ntawm lub substrate, tsis muaj qhov yuav tsum tau ua, nws tuaj yeem yog semiconductor lossis tsis yog. Tsis tas li ntawd, cov txheej txheej nrog cov khoom siv hluav taws xob thiab kho qhov muag sib txawv tuaj yeem npaj los ntawm ob qho tib si impurity diffusion thiab ion implantation rau ntawm qhov chaw ntawm lub semiconductor substrate hauv ntau yam. Cov txheej nyias nyias kuj tseem tuaj yeem ua tiav ua cov txheej semiconductor feem ntau.
Cov txheej txheej semiconductor nqus tsev yog qhov tseem ceeb hauv cov khoom siv hluav taws xob txawm tias nws yog rau cov khoom siv nquag lossis cov khoom siv tsis siv neeg. Nrog rau kev nce qib tas mus li ntawm cov thev naus laus zis txheej txheej semiconductor nqus tsev, kev tswj hwm qhov ua tau zoo ntawm zaj duab xis tau ua tau.
Nyob rau xyoo tas los no, cov txheej txheem amorphous thiab cov txheej txheem polycrystalline tau ua tiav sai hauv kev tsim cov khoom siv photoconductive, cov raj xa hluav taws xob coated field-effect, thiab cov roj teeb hnub ci ua haujlwm siab. Tsis tas li ntawd, vim yog kev txhim kho ntawm cov txheej txheem semiconductor nqus tsev thiab cov zaj duab xis nyias ntawm cov sensors, uas kuj txo qhov nyuaj ntawm kev xaiv cov khoom siv thiab ua rau cov txheej txheem tsim khoom yooj yim dua. Cov khoom siv txheej txheem semiconductor nqus tsev tau dhau los ua qhov tsim nyog rau cov ntawv thov semiconductor. Cov khoom siv no tau siv dav rau cov txheej txheem semiconductor ntawm cov khoom siv koob yees duab, cov roj teeb hnub ci, cov transistors coated, kev tso tawm teb, cathode-light, electron emission, cov ntsiab lus thin film sensing, thiab lwm yam.
Cov kab txheej magnetron sputtering yog tsim los nrog lub kaw lus tswj hwm tag nrho, lub vijtsam kov yooj yim thiab nkag siab tau. Cov kab no tau tsim los nrog cov ntawv qhia zaub mov ua haujlwm tiav kom ua tiav kev saib xyuas tag nrho cov xwm txheej ua haujlwm rau tag nrho cov khoom ntawm kab ntau lawm, kev teeb tsa cov txheej txheem, kev tiv thaiv kev ua haujlwm thiab kev ua haujlwm ceeb toom. Tag nrho lub kaw lus tswj hwm hluav taws xob muaj kev nyab xeeb, txhim khu kev qha thiab ruaj khov. Nruab nrog lub hom phiaj magnetron sputtering ob sab saud thiab qis lossis lub kaw lus txheej ib sab.
Cov khoom siv no feem ntau yog siv rau cov laug cam ceramic, cov chip high-voltage capacitors thiab lwm cov txheej txheej substrate, cov chaw siv tseem ceeb yog cov laug cam hluav taws xob.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-07-2022