I-vacuum ion plating (i-ion plating ngokufutshane) bubuchwephesha obutsha bonyango lomphezulu obuphuhliswe ngokukhawuleza ngeminyaka yoo-1970, eyacetywa nguDM Mattox weNkampani yeSomdia eMelika ngo-1963.
Owokuqala kukuvelisa umphunga wesinyithi ngokufudumeza kunye nokukhupha izinto zefilimu, ezifakwe i-ionized ibe ngumphunga wesinyithi kunye ne-athomu ephezulu yamandla engathathi hlangothi kwi-gas discharge space plasma, kwaye ifikelele kwi-substrate ukwenza ifilimu ngesenzo sentsimi yombane; le yokugqibela isebenzisa i-ion ene-eneji ephezulu (Umzekelo, i-Ar +) ibhobhoza umphezulu wezinto zefilimu ukwenzela ukuba amasuntswana agxothiweyo afakwe kwi-ion okanye ii-athomu ezingathathi hlangothi zamandla aphezulu ngesithuba sokukhutshwa kwegesi, kwaye aqonde umphezulu we-substrate ukwenza ifilimu.
Eli nqaku lipapashwe ngu Guangdong Zhenhua, umenzi weizixhobo zokugquma ivacuum
Ixesha lokuposa: Mar-10-2023