Vacuum ion plating (Ion plating for short) waa tignoolajiyad cusub oo daawaynta dusha sare ah oo si degdeg ah loo sameeyay 1970-meeyadii, taas oo ay soo jeedisay DM Mattox oo ka tirsan Shirkadda Somdia ee dalka Maraykanka 1963. Waxa ay tilmaamaysaa habka isticmaalka isha uumiga ama uumiga ku tufayo si ay u uumi ama u tufo walxaha filimka ee jawiga faaruqa ah.
Midda hore waa in la dhaliyo uumiga birta iyadoo la kululeynayo oo uumi saarayo walxaha filimka, kaas oo qayb ahaan ionized galay uumiga birta iyo atamka dhexdhexaadka ah ee tamarta sare ee gaaska dheecaanka plasma, oo uu gaaro substrate si uu u sameeyo filim iyada oo loo marayo ficilka beerta korontada; tan dambe waxay isticmaashaa ion tamar sare leh (Tusaale ahaan, Ar +) waxay ku garaacdaa dusha walxaha filimka si ay qaybaha firidhsan u noqdaan ionized ions ama atomiyada dhexdhexaadka ah ee tamarta sare leh iyada oo loo marayo meesha bannaan ee dheecaanka gaaska, oo ay ogaadaan dusha sare ee substrate si ay u sameeyaan filim.
Maqaalkan waxaa daabacay Guangdong Zhenhua, soo saarahaqalabka daahan vacuum
Waqtiga boostada: Mar-10-2023

