Vacuum ion plaque (ion plate for short) ni tekinolojiya mishya yo kuvura ubuso yatejwe imbere byihuse mu myaka ya za 70, ikaba yarasabwe na DM Mattox wo muri sosiyete ya Somdia muri Amerika muri 1963. Bivuga inzira yo gukoresha isoko yo guhumeka cyangwa intego yo gusuka kugirango ihumeke cyangwa isohore ibikoresho bya firime mukirere cya vacu.
Icyambere nugukora ibyuka byumuyaga mugushyushya no guhumeka ibikoresho bya firime, bigizwe igice kimwe mubyuka byumuyaga hamwe na atome zidafite ingufu zitabogamye mumyuka ya plasma isohoka, kandi ikagera kuri substrate kugirango ikore firime binyuze mumashanyarazi; icya nyuma gikoresha ion zifite ingufu nyinshi (Urugero, Ar +) ibisasu hejuru yubutaka bwa firime kugirango uduce duto twavuyemo ioni muri ion cyangwa atome zidafite ingufu zidafite aho zibogamiye binyuze mumwanya wa gazi isohoka, hanyuma ikamenya ubuso bwa substrate kugirango ikore firime.
Iyi ngingo yasohowe na Guangdong Zhenhua, uruganda rwaibikoresho byo gutwika
Igihe cyo kohereza: Werurwe-10-2023