Vacuum ion plating (ion plating mwachidule) ndiukadaulo watsopano wochiritsa pamwamba womwe umapangidwa mwachangu m'zaka za m'ma 1970, womwe udapangidwa ndi DM Mattox wa Somdia Company ku United States mu 1963. Zimatanthawuza njira yogwiritsira ntchito gwero la evaporation kapena chandamale cha sputtering kuti asungunuke kapena kutulutsa mpweya wa filimu mu vacuum.
Yoyamba ndi kupanga zitsulo nthunzi ndi Kutentha ndi evaporating zakuthupi filimu, amene pang'ono ionized mu nthunzi zitsulo ndi mkulu-mphamvu ndale maatomu mu mpweya kumaliseche plasma danga, ndi kufika gawo lapansi kupanga filimu mwa zochita za kumunda magetsi; omaliza amagwiritsa ntchito ma ion amphamvu kwambiri (Mwachitsanzo, Ar +) amawombera pamwamba pa filimuyo kotero kuti particles sputtered ndi ionized mu ayoni kapena maatomu amphamvu osalowerera ndale kupyolera mu danga la kutulutsa mpweya, ndikuzindikira pamwamba pa gawo lapansi kuti apange filimu.
Nkhaniyi idasindikizidwa ndi Guangdong Zhenhua, wopangazida zokutira vacuum
Nthawi yotumiza: Mar-10-2023