Lub tshuab nqus tsev ion plating (ion plating luv luv) yog ib qho kev kho qhov chaw tshiab uas tau tsim kho sai hauv xyoo 1970s, uas tau thov los ntawm DM Mattox ntawm Somdia Company hauv Tebchaws Meskas hauv xyoo 1963. Nws yog hais txog cov txheej txheem ntawm kev siv cov evaporation los yog sputtering lub hom phiaj kom evaporate lossis sputter cov khoom siv hauv lub tshuab nqus tsev.
Cov qub yog tsim cov hlau vapor los ntawm cua sov thiab evaporating cov ntaub ntawv zaj duab xis, uas yog ib feem ionized rau hauv cov hlau vapor thiab high-zog nruab nrab atoms nyob rau hauv cov pa paug plasma qhov chaw, thiab mus txog rau lub substrate los tsim ib zaj duab xis los ntawm qhov kev txiav txim ntawm hluav taws xob teb; tom kawg siv lub zog ions (piv txwv li, Ar +) foob pob saum npoo ntawm cov khoom siv zaj duab xis kom cov sputtered hais yog ionized rau hauv ions los yog high-energy nruab nrab atoms los ntawm qhov chaw ntawm cov pa tawm, thiab paub qhov chaw ntawm lub substrate los tsim ib zaj duab xis.
Kab lus no yog luam tawm los ntawm Guangdong Zhenhua, lub chaw tsim khoom ntawmtshuab nqus tsev txheej
Post lub sij hawm: Mar-10-2023