I-vacuum ion coating (ebizwa ngokuthi i-ion plating) yi-United States ngo-1963, inkampani iSomdia DM Mattox eyahlongozwayo, ngawo-1970 kube ukuthuthukiswa okusheshayo kobuchwepheshe obusha bokwelashwa kobuso. Ibhekisela ekusetshenzisweni komthombo wokuhwamuka noma ukubhoboza endaweni engcolile ukuze ifilimu ikwazi ukuhwamuka noma ukubhoboza, ukuhwamuka noma ukubhoboza ingxenye yezinhlayiya esikhaleni sokukhishwa kwegesi kuhlanganiswe kuma-ion ensimbi.
Lezi zinhlayiya zifakwa ku-substrate ngaphansi kwesenzo sensimu kagesi ukuze kukhiqizwe inqubo yefilimu encane.
Ukufakwa kwe-ion nge-vacuum kwezinhlobo eziningi, ngokuvamile ngokwezinto ezisetshenziswayo ze-membrane ukukhiqiza umthombo we-ion kuzohlukaniswa izinhlobo ezimbili: uhlobo lomthombo wokuhwamuka, ukufakwa kwe-ion nge-ion kanye nokufakwa kwe-ion okuqondiwe. Owokuqala uyahwamuka ngokushisa izinto zefilimu ukuze kukhiqizwe umusi wensimbi, ukuze ufakwe kancane ube umusi wensimbi kanye nama-athomu angathathi hlangothi anamandla aphezulu esikhaleni se-plasma yokukhipha igesi, ngendima yensimu kagesi ukuze kufinyelelwe esisekelweni ukuze kukhiqizwe amafilimu amancane; okokugcina ukusetshenziswa kwama-ion anamandla aphezulu (isb., Ar +) ebusweni befilimu ukuze kwenziwe ukuchitheka kwezinhlayiya ngesikhala sokukhishwa kwegesi okufakwe kuma-ion noma ama-athomu angathathi hlangothi anamandla aphezulu, ukuze kufinyelelwe ebusweni be-substrate futhi kukhiqizwe ifilimu.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Mashi-07-2024