Kuphimba kwa ion mu vacuum (kotchedwa ion plating) ndi kampani ya ku United States mu 1963 yomwe idapereka lingaliro la kampani ya Somdia DM Mattox, m'ma 1970 kwakhala chitukuko chachangu chaukadaulo watsopano wochizira pamwamba. Limatanthauza kugwiritsa ntchito gwero la nthunzi kapena chandamale cha sputtering mumlengalenga wa vacuum kotero kuti filimuyo imatulutsa nthunzi kapena sputtering, evaporation kapena sputtering kuchokera ku gawo la tinthu tating'onoting'ono tomwe tili mu malo otulutsira mpweya tomwe timasinthidwa kukhala ion yachitsulo.
Tinthu timeneti timayikidwa pa substrate pansi pa mphamvu yamagetsi kuti tipange njira yopyapyala ya filimu.
Kupaka ma ion a vacuum amitundu yosiyanasiyana, nthawi zambiri malinga ndi zinthu zomwe zimapangidwa ndi nembanemba, ma ion source adzagawidwa m'mitundu iwiri: mtundu wa gwero la evaporation, ion plating ndi sputtering, ion plating. Choyamba chimasanduka nthunzi mwa kutentha zinthu za filimu kuti zipange nthunzi zachitsulo, kotero kuti zimasanduka pang'ono kukhala nthunzi zachitsulo ndi ma atomu osalowerera m'malo mwa plasma yotulutsa mpweya, kudzera mu gawo la magetsi kuti lifike pansi kuti lipange mafilimu opyapyala; chomaliza ndi kugwiritsa ntchito ma ion amphamvu kwambiri (monga Ar +) pamwamba pa filimu kuti apange ma sputtering kuchokera ku tinthu tating'onoting'ono kudzera mu malo otulutsa mpweya omwe amasinthidwa kukhala ma ion kapena ma atomu osalowerera m'malo, kuti afike pamwamba pa substrate ndikupanga filimuyo.
– Nkhaniyi yatulutsidwa ndiwopanga makina ophikira vacuumGuangdong Zhenhua
Nthawi yotumizira: Marichi-07-2024