I-vacuum ion coating (ebizwa ngokuba yi-ion plating) yi-United States ngo-1963, inkampani yaseSomdia i-DM Mattox eyacetywayo, ngeminyaka yoo-1970 ibiluphuhliso olukhawulezileyo lwetekhnoloji entsha yonyango lomphezulu. Ibhekisa ekusetyenzisweni komthombo womphunga okanye injongo yokutshiza emoyeni we-vacuum ukuze izinto zefilimu zitshize okanye zitshize, zitshize okanye zitshize inxalenye yamasuntswana kwindawo yokukhupha igesi i-ionized ibe yi-ions zesinyithi.
Ezi nxalenye zifakwa kwi-substrate phantsi kwesenzo sentsimi yombane ukuze kuveliswe inkqubo yefilimu encinci.
Ukufakwa kwee-ion nge-vacuum kwiintlobo ezininzi, ngokuqhelekileyo ngokwezinto ezisetyenziswa kwi-membrane ukuvelisa umthombo we-ion kuya kwahlulwahlulwa zibe ziintlobo ezimbini: uhlobo lomthombo wokufuma, uhlobo lwe-ion plating kunye nokufakwa kwee-ion target target sputtering. Eyokuqala iyatshiswa ngokufudumeza izinto zefilimu ukuze kuveliswe umphunga wesinyithi, ukuze i-ionized kancinci ibe yimiphunga yesinyithi kunye nee-athomu ezingathathi hlangothi ezinamandla aphezulu kwindawo yeplasma yokukhupha igesi, ngendima yentsimi yombane ukufikelela kwi-substrate ukuvelisa iifilimu ezincinci; eyokugqibela kukusetyenziswa kwee-ions ezinamandla aphezulu (umz., Ar +) kumphezulu wefilimu ukuze kwenziwe ukutshiza kwee-particles kwindawo yokukhutshwa kwegesi eyenziwe i-ion okanye ii-athomu ezingathathi hlangothi ezinamandla aphezulu, ukufikelela kumphezulu we-substrate kunye nokuvelisa ifilimu.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha leposi: Matshi-07-2024